COMBE: A Powerful New Tool for Materials Science

Božović, I.; Matijasevic, V.

doi:10.4028/www.scientific.net/msf.352.1

Cited by 7 publications

(3 citation statements)

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“…The ability to monitor the surface termination, together with rate control of individual cations has enabled several groups to perfect the epitaxial growth of oxide compounds that are unstable in the bulk and create atomically precise heterostructures. [61][62][63][64] Underlying oxide MBE is the requirement to deliver sufficient oxygen to the growing film to stabilize the crystal structure while maintaining the cleanliness and long molecular mean-free-path necessary for MBE.…”

Section: Molecular Beam Epitaxy (Mbe)mentioning

confidence: 99%

The Materials Science of Functional Oxide Thin Films

Blamire¹,

MacManus‐Driscoll²,

Mathur³

et al. 2009

Advanced Materials

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Research in the area of functional oxides has progressed from study of their basic chemistry and structure to the point at which an enormous range of desirable properties are being explored for potential applications. The primary limitation on exploitation is the difficulty of achieving sufficiently precise control of the properties because of the range of possible defects in such materials and the remarkably strong effect of such defects on the properties. This review outlines the reasons underlying this sensitivity and recent results that demonstrate the levels of control which are now possible.

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Section: Molecular Beam Epitaxy (Mbe)mentioning

confidence: 99%

The Materials Science of Functional Oxide Thin Films

Blamire¹,

MacManus‐Driscoll²,

Mathur³

et al. 2009

Advanced Materials

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“…Given the number of process variables that can affect a material, it is not surprising that combinatorial methods are becoming more commonly used to produce and identify promising candidate materials for development into future products. − In the area of electronic materials, for example, it would be useful if one could deposit varied forms of materials in a survey approach and characterize their electrical properties after deposition and postprocessing. In many cases, it would be beneficial if the electrical properties of the materials, such as resistance or capacitance, could be measured during the processing of multiple samples in parallel.…”

Section: Introductionmentioning

confidence: 99%

Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration

Taylor

Semancik

2002

Chem. Mater.

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An approach for high-throughput rapid screening of chemical vapor deposition (CVD) materials using micromachined silicon microheater arrays is described. To illustrate this approach, titanium dioxide was deposited by CVD, using titanium(IV) nitrate and titanium-(IV) isopropoxide at temperatures between 130 and 815 °C. Deposition was confined to the microhotplate elements within 4-and 16-element arrays. Film microstructure was examined by scanning electron microscopy. In situ electrical measurements were made with integrated microcontacts during the deposition of TiO 2 using titanium(IV) isopropoxide. A novel approach using temperature-programmed deposition with temperature ramp rates up to 800 °C/s was also employed for microstructure modification during deposition. Additionally, the steep temperature gradients present on the microhotplate supports have been demonstrated to provide an excellent platform for investigating temperature-dependent microstructures.

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“…To meet this experimental challenge, we have developed the combinatorial MBE (COMBE) technique [2][3][4] as well as the matching high-throughput low-temperature transport measurement technique. 5,6 In contrast to the conventional MBE sample growth geometry, in our apparatus the evaporating sources (thermal effusion Knudsen cells) are aimed at the substrate at a shallow angle (20 • ).…”

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confidence: 99%

Perspective: Extremely fine tuning of doping enabled by combinatorial molecular-beam epitaxy

Božović

2015

APL Materials

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Chemical doping provides an effective method to control the electric properties of complex oxides. However, the state-of-art accuracy in controlling doping is limited to about 1%. This hampers elucidation of the precise doping dependences of physical properties and phenomena of interest, such as quantum phase transitions. Using the combinatorial molecular beam epitaxy, we improve the accuracy in tuning the doping level by two orders of magnitude. We illustrate this novel method by two examples: a systematic investigation of the doping dependence of interface superconductivity, and a study of the competing ground states in the vicinity of the insulator-to-superconductor transition.

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COMBE: A Powerful New Tool for Materials Science

Cited by 7 publications

References 0 publications

The Materials Science of Functional Oxide Thin Films

The Materials Science of Functional Oxide Thin Films

Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration

Perspective: Extremely fine tuning of doping enabled by combinatorial molecular-beam epitaxy

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