Columnar Thin Films for Three-Dimensional Microbatteries

Abstract

Controlled-porosity Si thin films suitable for use as high-aspect-ratio microbattery electrodes were produced using the glancing angle deposition ͑GLAD͒ technique. GLAD is a high-vacuum physical vapor deposition method that can be used to produce a variety of film morphologies from most vacuum-compatible materials. No lithographic steps were required to create the porous, columnar thin films. Initial electrochemical results indicate large gravimetric and areal capacities ͑3600 mAh/g, 90 Ah/cm 2 , respectively͒, and good capacity retention ͑3000 mAh/g after 70 charge/discharge cycles͒ can be obtained from Si vertical post morphology films. Areal capacity and capacity retention can likely be further improved by optimizing the film morphology, electrode material composition, and cycling conditions.

Electrodeposited porous-microspheres Li–Si films as negative electrodes in lithium-ion batteries

“…The capacity could retain 560 A h cm −2 m −1 after 15 cycles, and the available capacity was dependent on the amount of the incorporated Sn [9]. It is also noticed that most of the Si or Si-based thin film electrodes have unsatisfactory coulombic efficiency at the first cycle, which mainly originatd from the formation of a solid electrolyte interphase (SEI) on the electrode surface [1,[8][9][10][11][12].…”

“…The thin-film lithium-ion battery is one of the most favorite options because it can provide a high energy and power density [1]. Recenly, they have been used in smartcards, implantable medical devices, microelectromechanical systems (MEMS), and others [2].…”

“…A 500-nm thick Si thin film with a porosity of ca. 80% presented a reversible capacity of over 90 A h cm −2 and good capacity retention (75 A h cm −2 after 70 cycles) [1]. The Seong group proposed Si-Sn nanocomposite electrodes fabricated by an RF-magnetron sputtering technique.…”

Antibacterial effect, structural characterization, and some applications of silver chiral nano-flower sculptured thin films

“…Sculptured nanostructures (range in size between 1 and 100 nm) fabricated by these methods have many applications such as optical filters [46], photonic crystals [47], catalysts [48], magnetic storages [49], micro-batteries [50], bioscaffolds [51], and microchannels [52].…”

Graphite microspheres decorated with Si particles derived from waste solid of organosilane industry as high capacity anodes for Li-ion batteries

“…There are mainly four ways to improve the Si anode electrode for lithium ion batteries: (1) fabricating nanostructured Si materials; (2) surface coating; (3) improving the electrolyte; (4) improving the current collector. Therefore, in recent years many attempts have been carried out to develop the various nanostructured Si anode materials to accommodate the volume changes [8e11], such as Si nanocrystals [12,13], nanowires [14e20], nanotubes [21e23], nanorods [24], films [25,26], hollow nanospheres [10,27], and porous Si [28,29]. However, the essential technical barrier of the severe pulverization of the active Si derived from its volume expansion has not been successfully overcome.…”