Lithium fluoride (LiF) films treated by lowenergy electrons represent a very promising candidate for the realization of miniaturized broad band optical devices like active waveguides and microcavities. The main properties, in particular the refractive index, density, structure and microstructure, of polycrystalline LiF films grown by thermal evaporation on amorphous and crystalline substrates are discussed, together with their influence on colour centres formation induced by low-energy electron beam bombardment and on the choice of the main irradiation conditions.