Collimator based on a Schmidt camera mirror design and its application to the study of the wide-angle UV and VUV telescope

Чхало, Н. И.; Malyshev, I. V.; Pestov, A. E.; Полковников, В. Н.; Salashchenko, N. N.; Toropov, M. N.; Вдовичев, С. Н.; Strulya, I. L.; Plastinin, Yuri Alexandrovich; Rizvanov, Albert A.

doi:10.1117/1.jatis.4.1.014003

Cited by 4 publications

(4 citation statements)

References 15 publications

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“…Using the basic principles of Fourier optics, the complex optical field is analytically expressed through the light wave interference process for a single wavelength [ 13 , 14 ]. Therefore, a distribution model for the combined complex optical field in the non-narrowband case is obtained using the incoherent combination theory.…”

Section: Methodsmentioning

confidence: 99%

Photonics Scanning Pentaprism System for the Integrated Inspection of Large-Aperture Telescopes

Zhang

Wang

et al. 2023

Sensors

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To improve their spatial resolution and detection capabilities, future ground-based optical telescopes will have a size of 30 m, and the aperture of space telescopes will be increased to 10 m. Such large optical systems necessitate the development of large integrated testing equipment. In this study, spectrum and system alignment measurements and wavefront quality checking were performed using the sub-aperture detection method and a fiber-connected Photonics Scanning Pentaprism (PSP). First, the system was aligned using an optical truss, ensuring that the optical axis was properly positioned. Second, using a sub-aperture light beam though the entrance pupil, light spots were formed on the focal plane and transmitted to the spectrometer via fibers to obtain the corresponding spectral components. Then, by taking measurements at different system positions, a full-aperture spectrum response could be reached. Lastly, by photon-integrated interference on the focal plane, intensity interference fringes could be projected at the entrance pupil of the system. And the wavefront quality of the system could be verified by observing the fringe deformation. The measurement accuracy of the optical axis of the system is better than 2 mrad. The spectral measurement accuracy was better than 5%, and the wavefront measurement accuracy surpassed 0.1 wavelengths (1 wavelength = 633 nm). This study effectively enhanced the detection and in situ calibration capabilities of large telescope systems, ensuring that the performance requirements can be met in the design of future telescopes.

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Section: Methodsmentioning

confidence: 99%

Photonics Scanning Pentaprism System for the Integrated Inspection of Large-Aperture Telescopes

Zhang

Wang

et al. 2023

Sensors

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“…Результирующие изделия обладают допустимыми параметрами по точности формы и шероховатости для видимого и ультрафиолетового диапазонов длин волн, однако не обеспечивают точность, требуемую для МР и ЭУФ областей спектра [12]. Для формирования асферических поверхностей МР и ЭУФ диапазонов длин волн применяется ионно-пучковая асферизация с последующей коррекцией локальных ошибок формы [13]. Однако для реализации представленного на рис.…”

Section: Introductionunclassified

“…Однако для реализации представленного на рис. 2 профиля асферики из-за отсутствия осевой симметрии не могут быть использованы методики формирования асферических поверхностей с использованием сильноточных широкоапертурных источников ионов, описанные в [13,14], которые реализуются за счет вращения обрабатываемой детали позади формирующий ионный пучок диафрагмой. В работе [15] было сделано предложение о возможности формирования неосесимметричного профиля асферики с помощью методики коррекции локальных ошибок формы, т. е. за счет сканирования по поверхности малоразмерным ионным пучком, однако из-за малого тока ионов практической реализации метода в литературе не обнаружено.…”

Section: Introductionunclassified

Внеосевой Асферический Коллектор Для Экстремальной Ультрафиолетовой Литографии И Мягкой Рентгеновской Микроскопии

Malyshev¹,

Михайленко²,

Pestov³

et al. 2023

Журнал Технической Физики

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By the method of ion-beam shape correction, a small-sized ion beam formed a non–axisymmetric aspherical profile of the collector surface for an extreme ultraviolet radiation source TEUS-S100 with a numerical aperture of NA= 0.25, PV on the surface is 36.3 microns, the surface shape accuracy by standard deviation is 0.074 microns, which allowed to obtain a focusing spot with a width of 300 microns at half-height. To solve the problem, the technological ion source KLAN-53M was upgraded – the flat ion-optical system was replaced with a focusing one. The ion-optical system consisting of a pair of concave grids with a radius of curvature of 60 mm provided the following parameters of the ion beam: the ion current is 20 mA, the width at half–height is 8.2 mm at a distance of 66 mm from the cutoff of the ion source.

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“…High controllability of ion-beam machining process allows to create high-precision surfaces with highly complex asphere shape, and, as a result, to develop unique optical schemes, implementation of which was not possible earlier [19,20]. However, for successful implementation of this approach it is necessary to make highly smooth substrates at the first stage, since ion beams smooth down highfrequency roughness fairly well and almost do not impact on the mid-frequency roughness, starting from frequencies of 0.2−0.3 µm −1 [21,22].…”

Section: Introductionmentioning

confidence: 99%

Application of cerium oxide nanopowders for silicon polishing

et al. 2022

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The research methods and the first results obtained in the study of the roughness of single-crystal silicon (111) substrates processed at the final stage by various methods are described: traditional polishing without the use of chemical-mechanical polishing (CMP), with the use of CMP and without CMP, but with the use of oxide cerium nanopowders. The efficiency of using CeO2 nanopowders has been demonstrated. The following effective roughness values were obtained: without CMP - 3.56 nm, with CMP - 0.54 nm, and without CMP, but with CeO2 polishing - 0.93 nm. Keywords: Surface, roughness, X-ray optics, deep grinding-polishing.

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Collimator based on a Schmidt camera mirror design and its application to the study of the wide-angle UV and VUV telescope

Cited by 4 publications

References 15 publications

Photonics Scanning Pentaprism System for the Integrated Inspection of Large-Aperture Telescopes

Photonics Scanning Pentaprism System for the Integrated Inspection of Large-Aperture Telescopes

Внеосевой Асферический Коллектор Для Экстремальной Ультрафиолетовой Литографии И Мягкой Рентгеновской Микроскопии

Application of cerium oxide nanopowders for silicon polishing

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