Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer

Maity, Reshmi; Shuvro, Shonkho; Maity, Santanu; Maity, N. P.

doi:10.1007/s00542-019-04613-x

Cited by 4 publications

(2 citation statements)

References 27 publications

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“…If a static zeroth order solution is used as trial function and evaluated at r = 1/2 one gets (16) where Û is the normalized potential energy per area. The potential energy increases linearly with σ , whereas the electrostatic term lowers the potential energy for all values of α.…”

Section: Theorymentioning

confidence: 99%

“…Various models for pull-in instabilities have been demonstrated in the literature [10]- [16], but these models do commonly not include the effect from a built-in biaxial stress. Some of the published models include an analytical pull-in model for different geometries presented by Osterberg [17], where numerical constants are found from fits to calculations from a finite element method (FEM).…”

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confidence: 99%

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Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures

Havreland

Thomsen

2021

J. Microelectromech. Syst.

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This paper presents a zeroth and first order perturbative analysis of prestressed electrostatic actuated Microelectromechanical systems (MEMS). Perturbation theory is used to calculate the deflection profile of various MEMS structures, from which the pull-in voltage is estimated using the weighed residual method, where both a Galerkin expression and a Dirac delta function have been used as weight functions. A prestressed circular Capacitative Micromachined Ultrasonic Transducer (CMUT) is used as the main example in this paper. This device is modeled as a circular clamped plate subjected to an electrostatic pressure. The calculated pull-in voltage has been compared with experimental data of highly prestressed CMUTs, where a relative error between −36% and −8% is observed for a model that does not include stress. The model that includes the residual stress lowers the range of the relative error to values between −5% and 21%. To improve the accuracy of the pull-in voltage estimate Richardson extrapolation has been calculated from the zeroth and first order estimates. The pull-in voltage models are compared with a Finite Element Model (FEM), where an overestimation, in the high stress regime, of 10% is observed for the zeroth order model, less than 5% for the Galerkin method and 3% for the Richardson extrapolation.[2020-0358]

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Section: Theorymentioning

confidence: 99%

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confidence: 99%