“…TMDSO films are used in automotive, aerospace, and biomedical applications to act as barrier coatings and to resist scratching and crazing [ 6 ]. A number of studies have investigated the mechanical properties of HMDSO films [ 8 , 9 , 10 , 11 , 12 ], but significantly fewer have investigated TMDSO films [ 4 , 5 , 7 , 13 ]. Harder TMDSO films with higher Young’s moduli have been deposited with higher O 2 concentrations in the monomer feed because of the increase of Si-O-Si bonds within the film [ 4 , 5 , 7 ].…”