2004
DOI: 10.1002/jemt.20096
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Coherent nano‐area electron diffraction

Abstract: We describe the new coherent nano-area electron diffraction (NED) and its application for structure determination of individual nanostructures. The study is motivated by the challenge and the general lack of analytical techniques for characterizing nanometer-sized, heterogeneous phases. We show that by focusing electrons on the focal plane of the pre-objective lens using a 3rd condenser lens and a small condense aperture, it is possible to achieve a nanometer-sized highly parallel illumination or probe. The hi… Show more

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Cited by 85 publications
(55 citation statements)
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“…The superlattice structure was quantified using nanoarea electron diffraction. [24] An example of the superlattice nanoarea electron diffraction pattern is shown in Figure 1c. A diffraction pattern was also recorded from the STO substrate near the superlattice (not shown) and used for calibration.…”
mentioning
confidence: 98%
“…The superlattice structure was quantified using nanoarea electron diffraction. [24] An example of the superlattice nanoarea electron diffraction pattern is shown in Figure 1c. A diffraction pattern was also recorded from the STO substrate near the superlattice (not shown) and used for calibration.…”
mentioning
confidence: 98%
“…The existence of massive stacking faults also can be inferred from the streaky lines in the ED patterns. 16 Despite massive stacking faults, no misfit dislocation can be found in the NWs (Fig. 3(d)).…”
Section: Methodsmentioning
confidence: 95%
“…Transmission electron diffraction (TED) is an appropriate technique for complex nanostructure analysis because it is highly sensitive to local structure and it can be obtained using a small electron beam (Cowley, 1993;Spence and Zuo, 1992;Zuo et al, 2003Zuo et al, , 2004. Compared to the scanning electron microscope (SEM) based electron backscattering diffraction technique, the small interaction volume in TED allows for high spatial resolution.…”
Section: Introductionmentioning
confidence: 99%
“…Using this technique, Cowley demonstrated electron nanodiffraction for a number of interesting samples at resolution of 1 nm or less. In modern TEM instruments, a parallel electron beam of nanometers in diameter can be obtained with help of an additional condenser lens (minilens) (Zuo et al, 2003(Zuo et al, , 2004. In a field emission gun (FEG) TEM, the small beam gives excellent coherent diffraction patterns.…”
Section: Introductionmentioning
confidence: 99%