2020
DOI: 10.1021/acsami.0c06030
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Coherent and Incoherent Impacts of Nanopillars on the Thermal Conductivity in Silicon Nanomembranes

Abstract: Nanostructuring is the dominant approach for effective thermal conduction control in nanomaterials. In the past decade, researchers have been interested in thermal conduction control by the coherent effects in phononic crystal (PnC) systems. Recent theoretical works predicted that nanopillars on the surface of silicon membranes could cause a dramatic thermal conductivity reduction due to the phonon local resonances. However, this remarkable prediction has not been experimentally verified yet with the deep-nano… Show more

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Cited by 12 publications
(13 citation statements)
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References 45 publications
(79 reference statements)
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“…Relevant research on semiconductor materials, such as silicon nanowires (NWs) and membranes, carbon nanotubes and graphene nanoribbons, remarkably verify tunable TC arising from the resonant phonon hybridization, especially for the effect on low-frequency phonons. [7][8][9][10][11][12][13][14] In general, all the structures that can produce flat bands in part of or in the entire Brillouin zone can be regarded as resonant structures. Such structures can be formed with confined atom motions or confined phonon propagation in at least one direction.…”
Section: Introductionmentioning
confidence: 99%
“…Relevant research on semiconductor materials, such as silicon nanowires (NWs) and membranes, carbon nanotubes and graphene nanoribbons, remarkably verify tunable TC arising from the resonant phonon hybridization, especially for the effect on low-frequency phonons. [7][8][9][10][11][12][13][14] In general, all the structures that can produce flat bands in part of or in the entire Brillouin zone can be regarded as resonant structures. Such structures can be formed with confined atom motions or confined phonon propagation in at least one direction.…”
Section: Introductionmentioning
confidence: 99%
“…Recent thermal transport studies have shown that the in-plane thermal conductivity of silicon and its temperature dependence can be effectively reduced and tuned by patterning periodic arrays of holes [24][25][26] or arrays of pillars [27][28][29]. In silicon membranes with patterned arrays of holes (see Figure 1a-d) a strong reduction of~90% of the thermal conductivity was found compared to unpatterned Si membranes of equal thickness.…”
Section: Membrane-based Structuresmentioning
confidence: 99%
“…The authors attributed this behavior to the increased phonon scattering at the pillar/beam interface due to the intermixing of aluminum and silicon atoms. The same group later fabricated nanopillars on suspended silicon membranes and investigated the impact of nanopillars on the thermal conductivity at low temperatures (4-300 K) [29]. They found the thermal conductivity reduction caused by the nanopillars to be approximately~16%, which was attributed mainly to incoherent phonon boundary scattering.…”
Section: Membrane-based Structuresmentioning
confidence: 99%
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“…Recently, another group also tested the predicted behavior but reached to a different conclusion. [95] They fabricated nanopillars on suspended silicon membranes using damageless neutralbeam etching and investigated the impact of nanopillars on the thermal conductivity of the membranes in the 4-300 K range. They found that thermal conductivity reduction caused by the nanopillars does not exceed 16%, which is much weaker than that predicted by the theoretical works.…”
Section: Wwwadvelectronicmatdementioning
confidence: 99%