1984
DOI: 10.1021/i100016a009
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Coating flow of non-Newtonian fluids on a flat rotating disk

Abstract: The coating flow of non-Newtonian fluids on the surface of a flat rotating disk is analyzed with the power-law and Carreau constitutive equations. Numerical solutions using (1) the method of characteristics and (2) numerical integration are obtained for the film thickness profile as a function of spinning time, exhibiting the dynamics of the spin coating process for the deposition of polymer films for microelectronic devices. It is shown that even irregular (sinusoidal, Gaussian) initial fluid film thickness p… Show more

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Cited by 99 publications
(35 citation statements)
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“…To account for evaporation, Meyerhofer 2 included a correction based on the assumption that the spin-coating process consists of two different stages: (a) a ow dominated phase followed by (b) an evaporation dominated phase. There are reports 19,20 that further characterize the uid ow of non-Newtonian liquids. Later on, Cregan and O'Brien 21 considered that the solvent evaporation is simultaneous with the ow dominated phase because the solvent starts to evaporate once the suspension is pipetted on to the spinning substrate.…”
Section: Previous Resultsmentioning
confidence: 99%
“…To account for evaporation, Meyerhofer 2 included a correction based on the assumption that the spin-coating process consists of two different stages: (a) a ow dominated phase followed by (b) an evaporation dominated phase. There are reports 19,20 that further characterize the uid ow of non-Newtonian liquids. Later on, Cregan and O'Brien 21 considered that the solvent evaporation is simultaneous with the ow dominated phase because the solvent starts to evaporate once the suspension is pipetted on to the spinning substrate.…”
Section: Previous Resultsmentioning
confidence: 99%
“…Numerous groups have addressed this using different viscosity laws. [15][16][17][18] The behavior of film thinning of nonNewtonian fluids has now been modelled numerically. 19 However, the effect of evaporation and the consequences of height-dependent viscosity on thinning rate were not considered.…”
Section: B Thinning Of Polymer Solutionsmentioning
confidence: 99%
“…This pioneering work has been widely employed in the subsequent investigations on spin coating. For example, Acrivos et al [2], Jenekhe and Schuldt [3] extended the analysis of Emslie [1] to study the flow of a power-law liquid on a rotating disk. Whereas Charpin et al [4] investigated the axisymmetric spin coating of power law and Ellis fluids.…”
Section: Introductionmentioning
confidence: 99%