CO2 laser annealing on erbium-activated glass–ceramic waveguides for photonics

Goyes, C.; Ferrari, M.; Armellini, Cristina; Chiasera, Alessandro; Jestin, Y.; Righini, Giancarlo C.; Fonthal, Faruk; Solarte, Efraín

doi:10.1016/j.optmat.2008.10.005

Cited by 18 publications

(3 citation statements)

References 9 publications

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“…There have been attempts to anneal SiC films using infrared (IR) wavelength, as demonstrated in the study by Goyes et al [108]. In their experiment, a continuous wave CO 2 laser with a wavelength of 1060 nm and Gaussian beam distribution was employed to anneal an amorphous SiC film deposited on a silicon wafer under vacuum conditions.…”

Section: Silicon Carbide Laser Annealingmentioning

confidence: 99%

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Arduino,

Stassi,

Spano

et al. 2023

Materials

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Modifying material properties within a specific spatial region is a pivotal stage in the fabrication of microelectronic devices. Laser annealing emerges as a compelling technology, offering precise control over the crystalline structure of semiconductor materials and facilitating the activation of doping ions in localized regions. This obviates the necessity for annealing the entire wafer or device. The objective of this review is to comprehensively investigate laser annealing processes specifically targeting the crystallization of amorphous silicon (Si) and silicon carbide (SiC) samples. Silicon finds extensive use in diverse applications, including microelectronics and solar cells, while SiC serves as a crucial material for developing components designed to operate in challenging environments or high-power integrated devices. The review commences with an exploration of the underlying theory and fundamentals of laser annealing techniques. It then delves into an analysis of the most pertinent studies focused on the crystallization of these two semiconductor materials.

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Section: Silicon Carbide Laser Annealingmentioning

confidence: 99%

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Arduino,

Stassi,

Spano

et al. 2023

Materials

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“…The thermal stress between the fiber core and cladding can be modified using CO2-laser annealing [9,10]. The CO2 laser has also been useful in thermal annealing of semiconductors [11] and glass waveguides [12]. Since many applications employing fiber Bragg gratings, such as accurate wavelength-control devices in the telecommunication industry, require Bragg gratings with stabilized optical properties to support long-term usage, it is essential to study the decay characteristics of these Bragg gratings.…”

Section: Introductionmentioning

confidence: 99%

Impact of CO₂Laser Pretreatment on the Thermal Endurance of Bragg Gratings

Gunawardena¹,

Lai²,

Lim³

et al. 2016

Journal of the Optical Society of Korea

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The thermal endurance of fiber Bragg gratings (FBGs), written with the aid of 193-nm ArF excimer laser irradiation on H2-loaded Ge/B codoped silica fiber, and pretreated with a CO2 laser and a subsequent slow cooling process, is investigated. These treated gratings show relatively less degradation of grating strength during the thermal annealing procedure. The thermal decay characteristics of treated and untreated fiber, recorded over a time period of 9 hours, have been compared. The effect on the Bragg transmission depth (BTD) and the center-wavelength shift, as well as the growth of refractive-index change during the grating inscription process for both treated and untreated fiber, are analyzed.

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“…As a consequence, the distribution of lanthanide ions in a confined microenvironment, which exhibits lower phonon energy, higher refractive index, higher solubility of lanthanide ions, gives rise to particular interesting luminescent properties. In this sense, the optical properties and their correlation with structural features of sol-gel SiO 2 -TiO 2 [7,8], SiO 2 -HfO 2 [9][10][11][12][13][14], SiO 2 -ZrO 2 [15][16][17][18], SiO 2 -Ta 2 O 5 [6,19] and SiO 2 -Nb 2 O 5 [20,21] have been reported in the last years for NIR applications. In previous papers [20,21], we have described in details the NIR luminescence properties of Er 3 þ -doped SiO 2 -Nb 2 O 5 nanocomposites and pointed out a broadening of emission even though the Er 3 þ ions are located in Nb 2 O 5 nanoparticles.…”

mentioning

confidence: 99%

Near infrared emission and multicolor tunability of enhanced upconversion emission from Er 3+ –Yb 3+ co-doped Nb 2 O 5 nanocrystals embedded in silica-based nanocomposite and planar waveguides for photonics

Aquino

Ferrari

Maia

et al. 2016

Journal of Luminescence

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This work reports on the Yb 3 þ ion addition effect on the near infrared emission and infrared-to-visible up conversion from planar waveguides based on Er 3 þ-Yb 3 þ co-doped Nb 2 O 5 nanocrystals embedded in SiO 2-based nanocomposite prepared by a sol-gel process with controlled crystallization in situ. Planar waveguides and xerogels containing Si/Nb molar ratio of 90:10 up to 50:50 were prepared. Spherical-like orthorhombic or monoclinic Nb 2 O 5 nanocrystals were grown in the amorphous SiO 2-based host depending on the niobium content and annealing temperature, resulting in transparent glass ceramics. Crystallization process was intensely affected by rare earth content increase. Enhancement and broadening of the NIR emission has been achieved depending on the rare earth content, niobium content and annealing temperature. Effective Yb 3 þ-Er 3 þ energy transfer and a high-intensity broad band emission in the near infrared region assigned to the Er 3 þ ions 4 I 13/2-4 I 15/2 transition, and longer 4 I 13/2 lifetimes were observed for samples containing orthorhombic Nb 2 O 5 nanocrystals. Intense green and red emissions were registered for all Er 3 þ-Yb 3 þ co-doped waveguides under 980 nm excitation, assigned to 2 H 11/2-4 I 15/2 (525 nm), 4 S 3/2-4 I 15/2 (545nm) and 4 F 9/2-4 I 15/2 (670 nm) transitions, respectively. Different relative green and red intensities emissions were observed, depending upon niobium oxide content and the laser power. Upconversion dynamics were determined by the photons number, evidencing that ESA or ETU mechanisms are probably occurring. The 1931 CIE chromaticity diagrams indicated interesting color tunability based on the waveguides composition and pump power. The nanocomposite waveguides are promising materials for photonic applications as optical amplifiers and WDM devices operating in the S, C, and L telecommunication bands; and as upconverter materials for visible upconversion lasers, biomedical applications, energy conversion for solar cells and others.

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CO2 laser annealing on erbium-activated glass–ceramic waveguides for photonics

Cited by 18 publications

References 9 publications

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Impact of CO₂Laser Pretreatment on the Thermal Endurance of Bragg Gratings

Near infrared emission and multicolor tunability of enhanced upconversion emission from Er 3+ –Yb 3+ co-doped Nb 2 O 5 nanocrystals embedded in silica-based nanocomposite and planar waveguides for photonics

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CO2 laser annealing on erbium-activated glass–ceramic waveguides for photonics

Cited by 18 publications

References 9 publications

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Silicon and Silicon Carbide Recrystallization by Laser Annealing: A Review

Impact of CO2Laser Pretreatment on the Thermal Endurance of Bragg Gratings

Near infrared emission and multicolor tunability of enhanced upconversion emission from Er 3+ –Yb 3+ co-doped Nb 2 O 5 nanocrystals embedded in silica-based nanocomposite and planar waveguides for photonics

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Impact of CO₂Laser Pretreatment on the Thermal Endurance of Bragg Gratings