CO<sub>2</sub>/Sn LPP EUV sources for device development and HVM

Brandt, David C.; Fomenkov, Igor V.; Farrar, Nigel R.; Fontaine, Bruno La; Myers, David W.; Brown, Daniel J.; Ershov, Alex I.; Sandstrom, Richard L.; Vaschenko, G.; Böwering, N.; Das, Palash P.; Fleurov, Vladimir B.; Zhang, Kevin; Srivastava, Shailendra N.; Ahmad, Imtiaz; Rajyaguru, Chirag; Dea, Silvia De; Dunstan, Wayne J.; Baumgart, P.; Ishihara, Toshi; Simmons, Rod D.; Jacques, Robert N.; Bergstedt, Robert; Porshnev, P. I.; Wittak, Christopher J.; Rafac, Robert J.; Grava, Jonathan; Schafgans, A. A.; Tao, Y.; Hoffmann, K.; Ishikawa, Tedsuja; Evans, David R.; Rich, Spencer

doi:10.1117/12.2011212

Cited by 7 publications

(1 citation statement)

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“…According to the references 4 , axial-flow radio-frequency (RF)-excited CO 2 lasers were used as the amplifier and output power of over 10 kW 5 with the repetition rate in excess of tens of kilohertz were demonstrated. Selections of amplifiers become limited for constructing a tens-of-kilowatt short-pulse MOPA CO 2 laser system.…”

Section: Introductionmentioning

confidence: 99%

Highly-efficient high-power pulsed CO₂ laser characterized by transverse-flow laser amplifiers

et al. 2014

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In this paper, we provide a detailed review of development of a highly-efficient high-power nanosecond pulse CO 2 laser using transverse-flow radio-frequency (RF)-exited laser amplifiers, which is for extreme ultraviolet (EUV) light source of a next generation of nano-lithography. High-density excited high-power transverse-flow CO 2 lasers were designed and built for the application of laser produced plasma (LPP) EUV source. We carried out an amplification test of the transverse-flow CO 2 laser seeded by a nanosecond pulse CO 2 laser. A four-amplifier system generated an average output power of 21 kW with an electrical input power of 400 kW for discharges. The electrical-to-optical efficiency was 5.2%. The input pulse laser had an average power of 46 W, the repetition rate was 100 kHz, and the pulse duration was 15 ns. The transverse-flow CO 2 laser has strong points in high gain and availability of the multi-fold optical path. A highlyefficient amplification was experimentally proved characterized by transverse-flow CO 2 laser amplifiers even with lowpower seed. A transverse-flow CO 2 laser is a promising candidate for an amplifier in the LPP EUV light source.

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Section: Introductionmentioning

confidence: 99%