2016
DOI: 10.1088/0957-4484/27/13/135202
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Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators

Abstract: . At the same time, the films are highly stable in the high-temperature methane/hydrogen atmosphere typically required to grow single wall carbon nanotubes. We characterize molybdenum rhenium alloy films deposited via simultaneous sputtering from two sources, with respect to their composition as function of sputter parameters and their electronic dc as well as GHz properties at low temperature. Specific emphasis is placed on the effect of the carbon nanotube growth conditions on the film. Superconducting copla… Show more

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Cited by 11 publications
(25 citation statements)
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“…In this diagonal case, it is possible to reduce the number of Green's function in expression (67) by using the identity…”
Section: B Effective Admittance Of a Single Quantum Dot With Normal mentioning
confidence: 99%
“…In this diagonal case, it is possible to reduce the number of Green's function in expression (67) by using the identity…”
Section: B Effective Admittance Of a Single Quantum Dot With Normal mentioning
confidence: 99%
“…While our thin film deposition via co‐sputtering from two sources has the advantage of adjustable alloy composition (), other published results using pre‐alloyed sputter targets display significantly higher quality factors (). Given our excellent results using niobium, we can exclude problems with substrate, lithography, and detection circuitry.…”
Section: Discussionmentioning
confidence: 96%
“…The resonance frequency fr decreases strongly with temperature, as does the total quality factor. A quantitative description of this is given by the so‐called Mattis–Bardeen theory . The temperature dependence of fr and Qi can be expressed as fnormalrf0f0=α02thinmathspaceδσ2σ2, δ1Qi=α0δσ1σ2, with f0 and α0 as the zero‐temperature limit of resonance frequency and kinetic inductance fraction.…”
Section: Temperature Dependence Of Resonator Propertiesmentioning
confidence: 99%
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