Co-sputtered amorphous Nb–Ta, Nb–Zr and Ta–Zr coatings for corrosion protection of cyclotron targets for [18F] production

Skliarova, Hanna; Azzolini, O.; Johnson, Richard R.; Palmieri, V.

doi:10.1016/j.jallcom.2015.03.181

Cited by 14 publications

(2 citation statements)

References 72 publications

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“…4. Since corrosion resistance of Ta was much higher than that of Zr [19], Zr was preferentially corroded, and a large number of lamellar Ta structures appeared in Fig. 4(a)-(d).…”

Section: Xrd Patterns Of Ta-zr Alloysmentioning

confidence: 99%

Effects of Zr Contents on the Microstructure, Mechanical Properties and Biocompatibility of Ta-Zr Alloys

Chang

Liu

Yang

et al. 2018

MSF

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Ta-xZr (x = 90, 80, 70, 60 at.%) alloys with good mechanical properties and high density were prepared by powder metallurgy method and vacuum sintering technology. The surface morphologies and mechanical properties were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray energy dispersive spectroscopy (EDS). The results showed that lamellar Ta was observed with no second phase during the sintering process. The tensile strength and the Young's modulus increased with the Ta contents firstly and then decreased, and varied with the Ta contents in the range of 60.5 ± 5.03~163.0 ± 10.11 MPa and 4.5 ± 0.47~11.8 ± 1.16 GPa, respectively. In conclusion, The Ta-70Zr alloy is potentially useful in the hard tissue implants for its mechanical properties and biocompatibility.

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“…4. Since corrosion resistance of Ta was much higher than that of Zr [19], Zr was preferentially corroded, and a large number of lamellar Ta structures appeared in Fig. 4(a)-(d).…”

Section: Xrd Patterns Of Ta-zr Alloysmentioning

confidence: 99%

Effects of Zr Contents on the Microstructure, Mechanical Properties and Biocompatibility of Ta-Zr Alloys

Chang

Liu

Yang

et al. 2018

MSF

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show abstract

“…The chemical composition and surface structure of the implant surface affect the ability of the cells to attach, proliferate, and form bone and are important factors affecting the bonding strength and long-term stability of the implant [14,15]. Skliarova et al [16] deposited Nb-Zr alloy coatings with different alloy compositions by magnetron co-sputtering, and the coatings crystallized well. The microstructure and diffusion barrier efficiency of the coating were studied, which decreased with the increase in Nb content.…”

Section: Introductionmentioning

confidence: 99%

Study on Corrosion Resistance and Biological Properties of the Double Glow Plasma Nb-Zr Biological Implantation Alloying Layers

Zhao

Xiao

et al. 2022

Coatings

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In order to improve the corrosion resistance of implant materials and understand the corrosion mechanisms, we prepared a biomedical Nb-Zr alloying layer on 316L stainless steel using double-layer glow plasma surface-alloying technology and investigated the effects of gas pressures on its surface structure, mechanical properties, and corrosion behavior. In particular, the surface states of the substrate and alloying layers were investigated using 3D confocal micrographs, the water contact angle, and UV reflectance, which aims to study the effect of the surface quality on corrosion resistance and discuss the corrosion mechanisms. The results show that the working pressure has an effect on the current density, the sputtering amount of the alloying elements, and the diffusion process of the alloying elements during glow discharge. The Nb-Zr alloying layer prepared under a pressure of 40 Pa had a uniform and dense surface structure, and the distribution was island-like. A Nb-Zr alloying layer with a thickness of 15 μm was successfully obtained, including the diffusion layer and the deposition layer. Simultaneously, the elements Nb and Zr were gradually distributed along the depth, and a high Nb concentration formed in the Nb-Zr alloying layer. The solid solution formed by Zr in the Nb layer significantly improved the microhardness and corrosion resistance of the substrate. The Nb-Zr alloying layer prepared under a pressure of 40 Pa had the lowest corrosion current density and excellent corrosion resistance, which originated from the passive film formed by the Nb-Zr alloying layer that could inhibit the invasion of corrosive ions and improve the corrosion resistance. In addition, the Nb-Zr alloying layer could promote cell proliferation during long-term use and had good biocompatibility. Our study provides an efficient, high-quality processing method for the surface modification of biomedical metallic materials to form thicker Nb-Zr alloying layers as a cost-effective alternative to bulk Nb-based alloys.

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A newly developed Cu(Rh) alloy film and its characteristics and applications

Lin

2024

AAPPS Bull.

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A new type of copper (Cu)-rhodium (Rh)-alloy, Cu(Rh), films is developed by co-sputtering copper and rhodium onto silicon (Si) substrates under an argon (Ar) atmosphere. The new films are next annealed at 600 and 670 °C, or alternatively at 100 and 450 °C, for 1 h. Longer annealing to the films, for up to 8 days, is also conducted to explore resistivity variation. The resistivity of the new 300-nm-thick film is 2.19 μΩ cm after annealing at 670 °C for 1 h and drifts to 2.26 and 2.14 μΩ after annealing at 400 and 450 °C, respectively, for 200 h. A 2.7-μm-thick Sn layer is then thermally evaporated atop the new film for stable flip-chip solder joints; their metal and Cu-Sn intermetallic compound (IMC) growth processes vs. various annealing periods are tested. After annealing at 670 °C, the new 300-nm-thick film’s adhesive strength reaches 44.2 ± 0.01 MPa, which is 11 ~ 12-fold that of their pure Cu counterpart. Some key test results of the new film are disclosed herein, including its X-ray diffraction (XRD) patterns, transmission electron microscopy (TEM) images, secondary-ion mass spectrometry (SIMS), time-dependent dielectric-breakdown (TDDB) lifetime curves, and adhesive strength. The new film’s antibacterial efficacy arrives at an antibacterial ratio of approximately 100% against Staphylococcus aureus (S. aureus) BCRC 10451 for the 300-nm-thick film and approximately 99.82% for the 8 nm film, far superior to that of a pure Cu film, which is 0 with the same annealing temperature range. The new film, hence, seems to be a remarkable candidate material for various industrial applications, such as ultra-large-scale integrated circuits (ULSIC), micro-electronic circuits, printed circuits, flip-chip technology, medical care concerning antibacteria, and the like. Graphical Abstract A new type of copper (Cu)-rhodium (Rh)-alloy, Cu(Rh), films is developed by co-sputtering copper and rhodium onto silicon (Si) substrates under an argon (Ar) atmosphere and then annealing the new films at 600 and 670 °C, or alternatively at 100 and 450 °C, for 1 h. Longer annealing to the films, for up to 8 days, is also conducted to explore resistivity variation. The resistivity of the new 300-nm-thick film is 2.19 mW cm after annealing at 670 °C for 1 h and drifts to 2.26 and 2.14 mW after annealing at 400 and 450 °C, respectively, for 200 h. A 2.7-μm-thick Sn layer is next thermally evaporated atop the new film for stable flip-chip solder joints; their metal and Cu-Sn intermetallic compound (IMC) growth processes vs. various annealing periods are tested. After annealing at 670 °C, the new 300-nm-thick film’s adhesive strength reaches 44.2 ± 0.01 MPa, which is 11~12-fold that of their pure Cu counterpart. Some key test results of the new film are disclosed herein, including its X-ray diffraction (XRD) patterns, transmission electron microscopy (TEM) images, secondary-ion mass spectrometry (SIMS), time-dependent dielectric-breakdown (TDDB) lifetime curves, and adhesive strength. The new film’s antibacterial efficacy arrives at an antibacterial ratio of approximately 100% against Staphylococcus aureus (S. aureus) BCRC 10451 for the 300-nm-thick film and approximately 99.82% for the 8-nm film, far superior to that of a pure Cu film, which is 0 with the same annealing temperature range. The new film, hence, seems to be a remarkable candidate material for various industrial applications, such as ultra-large-scale integrated circuits (ULSIC), micro-electronic circuits, printed circuits, flip-chip technology, medical care concerning antibacteria, and the like.

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Co-sputtered amorphous Nb–Ta, Nb–Zr and Ta–Zr coatings for corrosion protection of cyclotron targets for [18F] production

Cited by 14 publications

References 72 publications

Effects of Zr Contents on the Microstructure, Mechanical Properties and Biocompatibility of Ta-Zr Alloys

Effects of Zr Contents on the Microstructure, Mechanical Properties and Biocompatibility of Ta-Zr Alloys

Study on Corrosion Resistance and Biological Properties of the Double Glow Plasma Nb-Zr Biological Implantation Alloying Layers

A newly developed Cu(Rh) alloy film and its characteristics and applications

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