Microsc Microanal
 2012
DOI: 10.1017/s1431927612003765
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Co-Clustering Via Nanochannel-Membrane Modulated Ion Implantation into Si3N4 Observed By Plan-View Aberration-Corrected STEM And EELS

Wei Guan
1
,
Umananda M. Bhatta
2
,
I. M. Ross
3
et al.

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

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