TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (
DOI: 10.1109/sensor.2003.1216927
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CMOS monolithic microelectrode array for stimulation and recording of natural neural networks

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Cited by 25 publications
(10 citation statements)
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“…Active devices, employing FETs were fabricated and 2D arrays demonstrated (Besl and Fromherz, 2002 ). Devices using CMOS technology were fabricated in academic facilities (DeBusschere and Kovacs, 2001 ) and industrial foundries, usually in conjunction with additional processing steps for biocompatibility reasons (Berdondini et al, 2002 ; Eversmann et al, 2003b ; Franks et al, 2003 ).…”
Section: Mea Technologymentioning
confidence: 99%
“…Active devices, employing FETs were fabricated and 2D arrays demonstrated (Besl and Fromherz, 2002 ). Devices using CMOS technology were fabricated in academic facilities (DeBusschere and Kovacs, 2001 ) and industrial foundries, usually in conjunction with additional processing steps for biocompatibility reasons (Berdondini et al, 2002 ; Eversmann et al, 2003b ; Franks et al, 2003 ).…”
Section: Mea Technologymentioning
confidence: 99%
“…1) (Franks et al, 2003). Fabrication was performed using an industrial double-polysilicon, triple-metal, 0.6 m CMOS process at Austriamicrosystems AG (Austria).…”
Section: System Designmentioning
confidence: 99%
“…Finally, at this point it should be mentioned that the use of microelectronics and in particular of CMOS-based sensors in the field of cell recording techniques does not only open the way into new areas, but also makes it possible to improve the performance, robustness, and user-friendliness of known sensor configurations: Recently, Franks et al suggested a monolithically integrated MEA on the basis of a CMOS process with on-chip analog-to-digital and digital-to-analog conversion and further circuitry aiming for the above mentioned goals compared to the present passive approaches [46]. As a result, researchers are starting to identify significant DNA markers of therapeutic and prognostic value.…”
Section: Microelectronic Chips For Molecular and Cell Biologymentioning
confidence: 99%