CMOS-Integrated Poly-SiGe Piezoresistive Pressure Sensor

Gonzalez, Pilar; Rakowski, Michal; Segundo, D. San; Severi, S.; Meyer, K. De; Witvrouw, Ann

doi:10.1109/led.2012.2201689

Cited by 24 publications

(4 citation statements)

References 23 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Together, their small size, high operational frequency, low power consumption, and compatibility with CMOS technology makes them particularly attractive for integrated sensing or microfluidic systems. 22,23 Further, with e-beam lithography on zinc oxide (ZnO) semiconducting films, GHz SAWs with wavelengths close to 1 μm can now be generated. 24 Hence, even though GHz is still far from electromagnetic wave frequencies, the wavelengths now do approach those of electromagnetic waves in air and liquid.…”

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

View full text Add to dashboard Cite

Surface acoustic waves (SAWs), are electro-mechanical waves that form on the surface of piezoelectric crystals. Because they are easy to construct and operate, SAW devices have proven to be versatile and powerful platforms for either direct chemical sensing or for upstream microfluidic processing and sample preparation. This review summarizes recent advances in the development of SAW devices for chemical sensing and analysis. The use of SAW techniques for chemical detection in both gaseous and liquid media is discussed, as well as recent fabrication advances that are pointing the way for the next generation of SAW sensors. Similarly, applications and progress in using SAW devices as microfluidic platforms are covered, ranging from atomization and mixing to new approaches to lysing and cell adhesion studies. Finally, potential new directions and perspectives on the field as it moves forward are offered, with a specific focus on potential strategies for making SAW technologies for bioanalytical applications.

show abstract

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

View full text Add to dashboard Cite

show abstract

“…Suspended 2D materials with atomicthin layer thickness offer a promising avenue for addressing the challenges associated with achieving ultrathin piezoresistive ma-terials (Table 1) . [223,224] The mechanical sensitivity at the center of the film increases with the square of (a/2) 2 /t, where a is the length of the square membrane and t is its thickness. Thus, a higher value of diameter to thickness ratio corresponds to a greater strain change inside the film for the same differential pressure, which in turn increases the sensitivity of the resistive device.…”

Section: Strain-based Pressure Sensorsmentioning

confidence: 99%

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.

show abstract

“…Surface acoustic wave (SAW) devices have been used in various sensing applications for measuring the changes in SAW device characteristics such as magnitude or phase shift in frequency response [20]. Several advantageous features such as their smaller size, higher resonant frequency, lower power consumption and better compatibility with CMOS technology makes them an appropriate choice when compared to micro-cantilever and natural clay-modified electrode based sensing systems [21][22][23][24]. Even though different SAW device configurations have been used, since its discovery by Lord Rayleigh in 1885 [25], the use of interdigital electrodes (IDEs) and reflectors by White and Voltmer in 1965 [26] and Staples et al in 1974 [27], respectively has proven to minimize the power dissipation and hence obtain optimized SAW generation and detection.…”

Section: Introductionmentioning

confidence: 99%

SH-SAW sensor based microfluidic system for the detection of heavy metal compounds in liquid environments

Ramshani

Reddy

Narakathu

et al. 2015

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

In this work, a guided shear horizontal mode surface acoustic wave (SH-SAW) sensor, fabricated by patterning gold (Au) interdigitated electrodes (IDE) on a 64°YX-LiNbO 3 based piezoelectric substrate, was used for the detection of heavy metal compounds. A flow cell, with a reservoir volume of 3 µl, which employs inlet and outlet valves for the microfluidic chamber and polydimethylsiloxane (PDMS) based microfluidic channels, was also designed and fabricated using an acrylic material. The frequency based response of the SAW sensor towards varying concentrations of heavy metal compounds such as lead nitrate (PbNO 3) and cadmium nitrate (CdNO 3) were investigated. As the surface acoustic wave propagates on the substrate, between input and output IDEs, a shift in the resonant frequency of the SAW device was observed due to the change in velocity of the wave caused by the varying concentrations of the test analytes. The results obtained demonstrated the capability of the system to detect picomolar level concentrations. The response of the SAW sensor is analyzed and presented in this paper.

show abstract

CMOS-Integrated Poly-SiGe Piezoresistive Pressure Sensor

Cited by 24 publications

References 23 publications

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

SH-SAW sensor based microfluidic system for the detection of heavy metal compounds in liquid environments

Contact Info

Product

Resources

About