CMOS compatible polarization splitter using hybrid plasmonic waveguide

Abstract

We design and experimentally demonstrate an ultrashort integrated polarization splitter on silicon-on-insulator (SOI) platform. Our polarization splitter uses a hybrid plasmonic waveguide as the middle waveguide in a three-core arrangement to achieve large birefringence, allowing only transverse-magnetic (TM) polarized light to directionally couple to the cross port of the directional coupler. Finite-difference time-domain (FDTD) and eigenmode expansive (EME) calculations show that the splitter can achieve an extinction ratio of greater than 15 dB with less than 0.5 dB insertion losses. The polarization splitter was fabricated on SOI platform using standard complementary metal-oxide-semiconductor (CMOS) technology and measured at telecommunications wavelengths. Extinction ratios of 12.3 dB and 13.9 dB for the transverse-electric (TE) and TM polarizations were obtained, together with insertion losses of 2.8 dB and 6.0 dB.

High-Sensitivity Polarization-Independent Biochemical Sensor Based on Silicon-on-Insulator Cross-Slot Waveguide

“…Once the low-index oxide layer under the narrow waveguide region is removed then the etching process is stopped so that two upper silicon layers are mechanically supported by the wider region at the two ends where silica was only partially removed. However, it should be noted that any CMOS compatible material, such as Si 3 N 4 [14], can also be used to fabricate the initial slot regions, which later on needs to be selectively removed to open up the empty slot region. Previously, sensing arm of several micron long incorporating cantilever suspension from one end has been fabricated with negligible deformation [15].…”

Silicon-based on-chip multiplexing technologies and devices for Peta-bit optical interconnects

“…Asymmetrical coupling systems can also be realized by introducing different types of optical waveguides with giant birefringence. For example, the regular SOI nanowire can be used as one of the coupling waveguides while the other waveguide in the coupling region can be made of some special optical waveguide, e.g., silicon nano-slot waveguides [132,133], silicon hybrid plasmonic waveguides [134,135], etc. Figure 19A and B show the PBS based on an asymmetrical coupling system consisting of a nano-slot waveguide and a SOI-nanowire [132].…”

Design and Optimization of Polarization Splitting and Rotating Devices in Silicon-on-Insulator Technology

“…Actually, the further research frontier of PS architectures based on asymmetric and symmetric bent couplers is represented by the integration of plasmonic waveguides [46,47]. In particular, in addition to conventional adiabatic modeevolution and mode-coupling principles already analyzed in this section, the use of metal layers in PS devices and their large birefringence allows the excitation of SPPs by specific polarization light.…”