CMOS Compatible MEMS Multienvironmental Sensor Chip for Human Thermal Comfort Measurement in Smart Buildings

Izhar,; Xu, Wei; Tavakkoli, Hadi; Zhao, Xu; Lee, Yi-Kuen

doi:10.1109/ted.2022.3209168

Cited by 7 publications

(2 citation statements)

References 30 publications

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“…At present, according to the different operating principles of humidity sensors, the common humidity sensors can be divided into three categories: resistive humidity sensors [1][2][3][4], thermally conductive humidity sensors [5][6][7], and capacitive humidity sensors [8][9][10][11][12]. Among them, resistive sensors use the interaction of water molecules with a resistive material to change the resistance value, but their relevance is usually limited, especially at very high and low humidity.…”

Section: Introductionmentioning

confidence: 99%

Forked Finger Electrode Based Acquisition Circuit and Humidity Correlation Model Design

Li,

Yan,

Ding

et al. 2024

Advances in Transdisciplinary Engineering

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With the continuous development of industry, humidity sensors have long been used in many fields such as industrial and agricultural production, public meteorological services, and medical fields. Humidity is a very important environmental parameter that has an impact on production, health and comfort in many fields. Conventional humidity sensors usually use capacitive or resistive measurement principles, which are not very sensitive and accurate to meet the needs of certain high precision and high sensitivity measurements. In addition, high-precision and high-sensitivity humidity sensors are usually expensive, which limits their use in certain applications. First, this paper designs a humidity acquisition hardware circuit based on forked-finger electrodes by taking advantage of their high sensitivity. Second, the data tested by the constant humidity chamber method and the saturated solution method are compared to select a suitable method for the humidity testing environment. Finally, the humidity correlation model design was carried out based on the least squares method. Thus, the humidity sensor based on the forked finger electrode obtained by the design can test the humidity in the environment easily and quickly, and the correlation model of the relative humidity-forked finger electrode capacitance value is obtained at the same time. By evaluating the model and calculating the error between the theoretical capacitance value and the actual capacitance value, it can be concluded that the model is a more reliable model within the error range without overfitting and underfitting problems. In turn, the problem of low sensitivity and high cost of the current humidity sensor can be well solved, providing a basis for relevant academic research and practical applications.

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Section: Introductionmentioning

confidence: 99%

Forked Finger Electrode Based Acquisition Circuit and Humidity Correlation Model Design

Li,

Yan,

Ding

et al. 2024

Advances in Transdisciplinary Engineering

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show abstract

“…Monolithic integrated sensors which share the same chip have attracted more and more attention due to their excellent properties for measuring different physical/chemical quantities. A variety of multifunctional integrated sensors are available [ 1 ], including integrated temperature/humidity/air velocity sensors [ 2 ], integrated pressure/temperature sensors [ 3 , 4 ], integrated accelerometers and magnetometers [ 5 , 6 ], etc., which can be used in a wide range of applications in industrial fields [ 7 ], wearable devices [ 8 , 9 , 10 ], robot environments [ 11 , 12 ], and so on. Dong et al developed integrated acceleration and pressure multifunction sensors with a glass–silicon–glass sandwich structure based on piezoresistive effect, which can be applied to automobile, aerospace, environmental monitoring, and other application fields [ 13 ].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Wang,

Xiao,

Zhao

et al. 2024

Micromachines

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In order to realize the measurement of three-axis acceleration, pressure, and magnetic field, monolithic integrated three-axis acceleration/pressure/magnetic field sensors are proposed in this paper. The proposed sensors were constructed with an acceleration sensor consisting of four L-shaped double beams, two masses, middle double-beams, and twelve piezoresistors, a pressure sensor made of a square silicon membrane, and four piezoresistors, as well as a magnetic field sensor composed of five Hall elements. COMSOL software and TCAD-Atlas software were used to simulate characteristics of integrated sensors, and analyze the working principles of the sensors in measuring acceleration, pressure, and magnetic field. The integrated sensors were fabricated by using micro-electro-mechanical systems (MEMS) technology and packaged by using inner lead bonding technology. When applying a working voltage of 5 V at room temperature, it is possible for the proposed sensors to achieve the acceleration sensitivities of 3.58 mV/g, 2.68 mV/g, and 9.45 mV/g along the x-axis, y-axis, and z-axis (through an amplifying circuit), and the sensitivities towards pressure and magnetic field are 0.28 mV/kPa and 22.44 mV/T, respectively. It is shown that the proposed sensors can measure three-axis acceleration, pressure, and magnetic field.

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Winter Thermal Suit with AutoTemperature Control

Premkumar,

Vijayaraja,

Dhanasekar

et al. 2023

2023 5th International Conference on Inventive Research in Computing Applications (ICIRCA)

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CMOS Compatible MEMS Multienvironmental Sensor Chip for Human Thermal Comfort Measurement in Smart Buildings

Cited by 7 publications

References 30 publications

Forked Finger Electrode Based Acquisition Circuit and Humidity Correlation Model Design

Forked Finger Electrode Based Acquisition Circuit and Humidity Correlation Model Design

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Winter Thermal Suit with AutoTemperature Control

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