CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

Lange, Dorus de; Brand, Oliver; Baltes, H.; Krzyżyński, Tomasz

doi:10.1115/1.1641774

Cited by 20 publications

(30 citation statements)

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“…There are a number of methods for exciting the resonant modes of cantilevers, thermally [6], electro-statically [7], and magnetically [12]. In this work we use two methods to excite the modes.…”

Section: Resonant Methodsmentioning

confidence: 99%

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Boyd¹,

Nock

Weiland

et al. 2011

Sensors and Actuators A: Physical

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As microelectromechnical systems (MEMS) becomes more complex and are produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most important properties for MEMS is the Young's modulus. This work describes the direct comparison of two methods often used for measuring the Young's modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.

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Section: Resonant Methodsmentioning

confidence: 99%

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Boyd¹,

Nock

Weiland

et al. 2011

Sensors and Actuators A: Physical

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“…However, it has a major disadvantage of being too slow since it depends on achieving thermal equilibrium in the microstructure, which is relatively slow process. Hence, it becomes difficult and inefficient to excite a microstructure with high frequency vibration using this method [1]. Also, it consumes high power because of the Joule heating.…”

Section: Electrothermal Actuationmentioning

confidence: 99%

Sensing and Actuation in MEMS

Younis

2011

Microsystems

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There are number of common transduction methods in MEMS. Some transform a change of a physical quantity, such as pressure and temperature, into an electric signal that can be measured. These are called sensing or detection methods. They include piezoelectric, piezoresistive, and electrostatic methods. Also, comes under this category the so-called resonant sensors, which detect the change in the resonance frequencies of microstructures upon sensing. Other transduction methods convert an input energy into a motion of a microstructure. These are called actuation methods, which include electrothermal, electromagnetic, piezoelectric, and electrostatic. Among the transduction methods, electrostatic actuation and detection are considered the most common in MEMS. Hence, electrostatic transduction will be under extensive investigations in the upcoming chapters. Next, basic knowledge on the most common transduction methods in MEMS is introduced.M. I. Younis, MEMS Linear and Nonlinear Statics and Dynamics, Microsystems 20, 57

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“…A theoretical expression of the partition coefficient was derived from the physical chemistry aspects of the polymer-based chemical sensing [31]. A formula that can be used to calculate the partition coefficient was presented where the thickness of the microcantilever and the polymer layer must be given [14].…”

Section: Introductionmentioning

confidence: 99%

Characterization of the gas sensors based on polymer-coated resonant microcantilevers for the detection of volatile organic compounds

Dong

Gao

Zhou

et al. 2010

Analytica Chimica Acta

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CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

Cited by 20 publications

References 0 publications

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Sensing and Actuation in MEMS

Characterization of the gas sensors based on polymer-coated resonant microcantilevers for the detection of volatile organic compounds

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