CMOS-based sealed membranes for medical tactile sensor arrays

Salo, T.; Vancura, T.; Brand, Oliver; Baltes, H.

doi:10.1109/memsys.2003.1189818

“…Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006). These technologies are not orientated to large area devices, and many of them are proposed for applications that demand high spatial resolution and good performance in terms of errors, like MIS (Salo et al 2003). Moreover, most of these realizations have ranges in the order of hundreds of mN or even μN.…”

Section: Introductionmentioning

confidence: 99%

Tactile sensors based on conductive polymers

Castellanos-Ramos

¹

,

Navas-González

²

,

Macicior

³

et al. 2009

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This paper presents results from a selection of tactile sensors that have been designed and fabricated. These sensors are based on a common approach that consists in placing a sheet of piezoresistive material on the top of a set of electrodes. We use a thin film of conductive polymer as the piezoresistive material. Specifically, a conductive water-based ink of this polymer is deposited by spin coating on a flexible plastic sheet, giving it a smooth, homogeneous and conducting thin film. The main interest in this procedure is that it is cheap and it allows the fabrication of flexible and low cost tactile sensors. In this work we present results from sensors made using two technologies. Firstly, we have used a flexible Printed Circuit Board (PCB) technology to fabricate the set of electrodes and addressing tracks. The result is a simple, flexible tactile sensor. In addition to these sensors on PCB, we have proposed, designed and fabricated sensors with screen printing technology. In this case, the set of electrodes and addressing tracks are made by printing an ink based on silver nanoparticles. The intense characterization provides us insights into the design of these tactile sensors.

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“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006). These technologies are not orientated to large area devices, and many of them are proposed for applications that demand high spatial resolution and good performance in terms of errors, like MIS (Salo et al 2003).…”

Section: Introductionmentioning

confidence: 99%

Tactile sensors based on conductive polymers

Castellanos-Ramos

¹

,

Navas-González

²

,

Macicior³

et al. 2009

View full text Add to dashboard Cite

This paper presents results from a selection of tactile sensors that have been designed and fabricated. These sensors are based on a common approach that consists in placing a sheet of piezoresistive material on the top of a set of electrodes. We use a thin film of conductive polymer as the piezoresistive material. Specifically, a conductive water-based ink of this polymer is deposited by spin coating on a flexible plastic sheet, giving it a smooth, homogeneous and conducting thin film. The main interest in this procedure is that it is cheap and it allows the fabrication of flexible and low cost tactile sensors. In this work we present results from sensors made using two technologies. Firstly, we have used a flexible Printed Circuit Board (PCB) technology to fabricate the set of electrodes and addressing tracks. The result is a simple, flexible tactile sensor. In addition to these sensors on PCB, we have proposed, designed and fabricated sensors with screen printing technology. In this case, the set of electrodes and addressing tracks are made by printing an ink based on silver nanoparticles. The intense characterization provides us insights into the design of these tactile sensors.

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“…The presented results demonstrate that the developed system can be used as a scalable, biocompatible, inexpensive, and renewable stress-strain sensor for biomedical and biomechan ical applications, such as for tactile sensors for minimally inva sive surgery, [37] foot plantar pressure measurement systems, [38] and motion detection. [39] …”

mentioning

confidence: 99%

Biocompatible and Sustainable Optical Strain Sensors for Large‐Area Applications

Kamita

¹

,

Frka‐Petesic

²

,

Allard

³

et al. 2016

Advanced Optical Materials

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By a simple two-step procedure, large photonic strain sensors using a biocompatible cellulose derivative are fabricated. Transient color shifts of the sensors are explained by a theoretical model that consideres the deformation of cholesteric domains, which is in agreement with the experimental results. The extremely simple fabrication method is suitable for both miniaturization and large-sale manufacture, taking advantage of inexpensive and sustainable materials

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CMOS-based sealed membranes for medical tactile sensor arrays

Cited by 18 publications

References 8 publications

Tactile sensors based on conductive polymers

Tactile sensors based on conductive polymers

Tactile sensors based on conductive polymers

Biocompatible and Sustainable Optical Strain Sensors for Large‐Area Applications

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