Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems

Mitrović, Aleksandra; Nagel, William S.; Leang, Kam K.

doi:10.1109/tmech.2020.3020047

Cited by 25 publications

(2 citation statements)

References 30 publications

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“…The piezoelectric actuator (PEA) is a normally-used driving component in compliant mechanisms owing to its high resolution, rapid response and ease of compact size [ 8 , 9 , 10 ]. With all outstanding superiorities as mentioned, the piezo-driven compliant mechanism has been one of the promising choices for precision manipulators [ 11 , 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Xie

Cheung

2022

Micromachines

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Compliant mechanisms are popular to the applications of micro/nanoscale manipulations. This paper proposes a novel triaxial parallel-kinematic compliant manipulator inspired by the Tripteron mechanism. Compared to most conventional triaxial compliant mechanisms, the proposed manipulator has the merits of structure compactness and being free of assembly error due to its unique configuration and the utilize of 3D printing technology. The compliance matrix modeling method is employed to determine the input stiffness of the compliant manipulator, and it is verified by finite-element analysis (FEA). Results show that the deviations between simulation works and the derived analytical models are in an acceptable range. The simulation results also reveal that the compliant manipulator can achieve a 16 μm × 16 μm × 16 μm cubic workspace. In this motion range, the observed maximum stress is much lower than the yield strength of the material. Moreover, the dynamic characteristics of the manipulator are investigated via the simulations as well.

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Section: Introductionmentioning

confidence: 99%

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Xie

Cheung

2022

Micromachines

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“…The direct driven type actuators always have simpler exciting scheme and structure. They always use lead zirconate titanate (PZT) piezoelectric ceramics stacks, which have nanometer resolution in the range of tens of microns, as driving element; to expand the travel range, stroke amplifiers are used to amplify the stroke of PZT stacks [30][31][32][33][34]. With the stroke amplifiers, the travel range of the direct driven type actuators can reach hundreds of microns.…”

Section: Introductionmentioning

confidence: 99%

An inertial bipedal piezoelectric actuator with integration of triple actuation modes

Deng¹,

Wang²,

Zhang³

et al. 2022

Smart Mater. Struct.

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Piezoelectric actuators based on inertial principle have been widely studied and applied in ultraprecision fields due to their simple structures. In this work, we proposed a bipedal piezoelectric actuator (BPA), which could work in synchronous inertial actuation mode (SIAM), bipedal alternating inertial actuation mode (BAIAM) and inertial impact actuation mode (IIAM). The step size, motion speed and carrying load are measured, and the rollback ratios are calculated to evaluate the displacement linearity. The experimental results confirm that SAIM has a simple exciting strategy, BAIAM has a smooth motion and IIAM has better load characteristics. The rollback ratio of the displacement curve working in BAIAM is 0.7% and that is 14.4%, 69% in SIAM and IIAM, respectively, which proves that BAIAM effectively improves the displacement linearity. When working in IIAM, the load mass varying from 100g to 350g, the speed does not change significantly (the maximum variation range is 4% compared with 23% in SAIM and BAIAM under 0 to 500 g load). The developed actuator can switch between the triple actuation modes to obtain compatible performance, it has potential in applications where large range, stable carrying load capacity and smooth motions are required, such as cell surgery and micromanipulation.

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ANN-Based Modeling and Control of a Pick and Place Manipulator

Mostafa

Ammar

et al. 2023

Lecture Notes in Networks and Systems

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Closed-Loop Range-Based Control of Dual-Stage Nanopositioning Systems

Cited by 25 publications

References 30 publications

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

Design and Modeling of a Novel Tripteron-Inspired Triaxial Parallel Compliant Manipulator with Compact Structure

An inertial bipedal piezoelectric actuator with integration of triple actuation modes

ANN-Based Modeling and Control of a Pick and Place Manipulator

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