Closed form expressions for RF MEMS switch actuation and release time

Kaajakari, V.

doi:10.1049/el:20093281

Cited by 36 publications

(46 citation statements)

References 3 publications

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“…The EDMC-sen (-func cording to the surface (negative load), and other gathers the charge invested in the process of detection (positive charge). The resultant deflection is measured by the accelerometer's control ASIC and a proportional output voltage results [1]. This procedure assures that both the mechanical (g-cell) and electronic sections of the accelerometer are fun sor is based on the emission of signals in two directions for the register of their g-cell curvatures of 2-dimensional surfaces.…”

Section: Resultsmentioning

confidence: 99%

“…The construction of an electronic sensor with base in accelerometers as transducer is an instrument that makes possible to measure curvatures of solid bodies in the space [1,2]. This promotes the development of systems applied to provide automatons with intelligence to execute accurate movements, between other technological and scientific applications that will be mentioned soon after.…”

Section: Introductionmentioning

confidence: 99%

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Design and Development of an Electronic Sensor to Detect and Measure Curvature of Spaces Using Curvature Energy

Bulnes¹,

Martínez²,

Mendoza³

et al. 2012

JST

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Using fine electromagnetic signals to measure observables of other fields like curvature and torsion of a space, and the corresponding value of their integrals of the action of perception of curvature through electronic signals that detect curvature on a curved surface, it is designed and constructed a sensor of curvature of accelerometer type that detects and curvature measures in 2 and 3-dimensional spaces using the programming of shape operators on spheres and the value of their integrals along the curves and geodesics in their principal directions.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Development of an Electronic Sensor to Detect and Measure Curvature of Spaces Using Curvature Energy

Bulnes¹,

Martínez²,

Mendoza³

et al. 2012

JST

View full text Add to dashboard Cite

show abstract

“…Reflexive seismology and geophones [1] Micro mechanical silicone acceleration sensors (MEMS) [2][3] are mass-produced and used in many fields (e.g. deploying air bags, laptops).…”

Section: Figurementioning

confidence: 99%

Seismic Vibration Sensor with Acoustic Surface Wave

Filipiak¹,

Steczko²

2013

Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices

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“…However, for higher voltage levels, e.g. 6 Solid186 elements are 20 noded quadratic hexahedral elements of ANSYS. They are used in this work to model the anisotropic elastic material behavior.…”

Section: Simulationsmentioning

confidence: 99%

“…GPS systems, radars or mobile phones). This is due to their high Q factor, low power consumption, low insertion loss, high isolation and many other superior characteristics compared to their functional equivalents such as diode based solid state relays [5,6]. A schematic representation of the capacitive RF-MEMS considered in this study is given in figure 1.…”

Section: Introductionmentioning

confidence: 99%

Crystal plasticity based modeling of time and scale dependent behavior of thin films

Ertürk¹,

Gao²,

Bielen³

et al. 2013

GAMM-Mitteilungen

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The micro and sub-micro scale dimensions of the components of modern high-tech products pose challenging engineering problems that require advanced tools to tackle them. An example hereof is time dependent strain recovery, here referred to as anelasticity, which is observed in metallic thin film components of RF-MEMS switches. Moreover, it is now well known that the properties of a thin film material strongly depend on its geometrical dimensions through so-called size effects. A strain gradient crystal plasticity formulation (SGCP) was recently proposed [1][2][3][4], involving a back stress in terms of strain gradients capturing the lattice curvature effect. In the present work, the SGCP model is used in a realistic simulation of electrostatic bending of a free standing thin film beam made of either a pure fcc metal or a particle strengthened Al-Cu alloy. The model capabilities to describe the anelastic and plastic behavior of metallic thin films in comparison with experimentally available data are thereby assessed. Simulation results show that the SGCP model is able to predict a macroscopic strain recovery over time following the load removal. The amount of the anelastic relaxation and the accompanying relaxation times result from the rate dependent modeling approach, the basis of which is phenomenological only. The SGCP model is not fully capable of describing the permanent deformations in an alloy thin beam as observed in electrostatic experiments. Hence, to incorporate realistic time constants and the influence of the microstructure into the mechanical behavior of the thin film material, an improved constitutive law for crystallographic slip is necessary within the SGCP formulation.

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Closed form expressions for RF MEMS switch actuation and release time

Cited by 36 publications

References 3 publications

Design and Development of an Electronic Sensor to Detect and Measure Curvature of Spaces Using Curvature Energy

Design and Development of an Electronic Sensor to Detect and Measure Curvature of Spaces Using Curvature Energy

Seismic Vibration Sensor with Acoustic Surface Wave

Crystal plasticity based modeling of time and scale dependent behavior of thin films

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