2020
DOI: 10.1021/acs.cgd.0c00506
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Classification of Reflection High-Energy Electron Diffraction Pattern Using Machine Learning

Abstract: Reflection high-energy electron diffraction (RHEED) has wide application because it allows in situ observation of the sample surface behavior during molecular beam epitaxy growth. In particular, the RHEED pattern has been used as a milestone for growth condition calibration because it dynamically changes depending on the sample temperature, material supply rate, and supply ratio. However, RHEED pattern analysis depends on the accumulated know-how of the operator and has a time limitation; thus, its application… Show more

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Cited by 21 publications
(11 citation statements)
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“…反射高能电子衍射(RHEED)可现场观察分子束外 延生长过程中的样品表面行为, 具有广泛的应用前景, 但 RHEED 模式分析对操作人员具有较高要求, 需要其 拥有大量的专业知识积累和操作经验。因此,将其应用 于实时反馈控制是十分困难的. Kwoen 团队 [50] 使用卷积 神经网络(CNN)的机器学习方法识别输入数据库中的特 征点, 其适用于具有可变性的图像分类. Kwoen 团队提 出了一种在连续旋转过程中识别 GaAs 衬底的 RHEED 模式测量方法, 并建立了生长条件的数据集.…”
Section: 辅助表征unclassified
“…反射高能电子衍射(RHEED)可现场观察分子束外 延生长过程中的样品表面行为, 具有广泛的应用前景, 但 RHEED 模式分析对操作人员具有较高要求, 需要其 拥有大量的专业知识积累和操作经验。因此,将其应用 于实时反馈控制是十分困难的. Kwoen 团队 [50] 使用卷积 神经网络(CNN)的机器学习方法识别输入数据库中的特 征点, 其适用于具有可变性的图像分类. Kwoen 团队提 出了一种在连续旋转过程中识别 GaAs 衬底的 RHEED 模式测量方法, 并建立了生长条件的数据集.…”
Section: 辅助表征unclassified
“…306 CNNs have been also used for Bragg peak integration of neutron crystallographic images with the algorithm being capable of recognizing both location and shape of the peaks in the input image. 307 Besides, CNNs can be used for similar purposes in classifying crystallographic images from reflection high-energy electron diffraction 308 and X-ray freeelectron laser. 77 Furthermore, serial crystallography would greatly profit from the real-time classification of images with and without a diffraction pattern provided by CNNs.…”
Section: High Throughput Materials Discovery and Crystal Characteriza...mentioning
confidence: 99%
“…With the development of artificial intelligence technology, one should consider adopting machine learning (ML) methods for analyzing the complete RHEED data to advance the existing thin-film growth methods and design fully autonomous material synthesis techniques [ 13 16 ]. Deep learning models, such as convolutional neural networks, classified the surface pattern and reconstruction of GaAs [ 17 ] and Fe x O y [ 18 ] with a high accuracy based on the RHEED data. The surface evolution and transitions in an entire RHEED data sequence were also examined for various oxide materials using unsupervised ML methods such as principal component analysis (PCA) and K-means clustering [ 19 21 ].…”
Section: Introductionmentioning
confidence: 99%