Circular diaphragm-based MOEMS pressure sensor using ring resonator

Yashaswini, P. R.; Mamatha, N.; Panigrahi, Suvasini

doi:10.1007/s41870-020-00534-5

Cited by 12 publications

(6 citation statements)

References 30 publications

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“…From the literary work-study, several writers have shown that openings in piece setup are much better compared to poles in Air setup in regards to high-Q-factor [8], [12], [13]. Inspired by these research studies searching for a unique photonic crystal-centered 'Holes in Slab' setup utilizing Lumericals device is suggested in this work to improve the efficiency specifications like high-quality factor [1], [3], [19].…”

Section: ░ 2 Simulation 21 Simulation Processmentioning

confidence: 99%

“…A "Holes in slab" configuration is chosen over "Rods in air" type from the literature survey of the previous papers [1][2][3][4].…”

Section: Steps To Be Followedmentioning

confidence: 99%

“…An optical sensor is a device that converts pressures into waves and can be utilized for sensing applications including process control, clinical analysis, weather monitoring, and armed forces. Typically, two ways of optical sensing have been documented, namely intensity and change in wavelength for Wavelength change, which is favored for sensing because wavelength change tends to have a high sensitivity [3,4,11]. When compared to 1DPCs and 3DPCs, the 2DPC sensor-based attracts increased attention from the scientific community due to its comparatively simple pattern, small size, good light confinement, accuracy in band gap calculation, and ease of integration.…”

mentioning

confidence: 99%

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Pressure Sensing Using a Two-Dimensional Photonic Crystal Sensor

Yashaswini¹,

Gowthami²,

Panigrahi³

2022

IJEER

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The noticing qualities such as the level of Sensitivity and Quality factor (Q-factor) are evaluated deliberately. A two-dimensional photonic crystal (2DPC) centered stress sensing unit is modeled and designed. The 2DPC centered pressure sensing unit is designed using holes in slab configuration. The L3 defect is created by customizing the spans of three silicon poles and is introduced between two waveguides. It has been revealed that the sensor’s wavelength is transferred linearly to a larger wavelength area, which improves the sensor’s performance.

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Section: ░ 2 Simulation 21 Simulation Processmentioning

confidence: 99%

“…A "Holes in slab" configuration is chosen over "Rods in air" type from the literature survey of the previous papers [1][2][3][4].…”

Section: Steps To Be Followedmentioning

confidence: 99%

mentioning

confidence: 99%

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Pressure Sensing Using a Two-Dimensional Photonic Crystal Sensor

Yashaswini¹,

Gowthami²,

Panigrahi³

2022

IJEER

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“…Thin films are widely used in many engineering and technical fields, and most of these have good elastic deformation ability and can exhibit large elastic deflection under lateral loading [ 1 , 2 , 3 , 4 , 5 , 6 ], which provides the possibility for designing and developing thin film elastic deflection-based devices [ 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 ]. Among them, capacitive pressure sensors are a good example of physical quantity (pressure) detection by deflection measurement.…”

Section: Introductionmentioning

confidence: 99%

Polymer Conductive Membrane-Based Non-Touch Mode Circular Capacitive Pressure Sensors: An Analytical Solution-Based Method for Design and Numerical Calibration

Zhang

et al. 2022

Polymers

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In this paper, an analytical solution-based method for the design and numerical calibration of polymer conductive membrane-based non-touch mode circular capacitive pressure sensors is presented. The accurate analytical relationship between the capacitance and applied pressure of the sensors is derived by using the analytical solution for the elastic behavior of the circular polymer conductive membranes under pressure. Based on numerical calculations using the accurate analytical relationship and the analytical solution, the analytical relationship between the pressure as output and the capacitance as input, which is necessary to achieve the capacitive pressure sensor mechanism of detecting pressure by measuring capacitance, is accurately established by least-squares data fitting. An example of how to arrive at the design and numerical calibration of a non-touch mode circular capacitive pressure sensor is first given. Then, the influence of changing design parameters such as membrane thickness and Young’s modulus of elasticity on input–output relationships is investigated, thus clarifying the direction of approaching the desired input–output relationships by changing design parameters.

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“…Many thin films are capable of exhibiting large elastic deflection under transverse loading [1][2][3][4][5][6], which provides the possibility of the design and development of elastic-deflectionbased devices [7][8][9][10][11][12][13][14]. Pressure sensors based on thin film elastic deflection have widespread applications in many areas, such as bio-medical applications, robotics, automobiles, and environmental monitoring, and capacitive structures are widely used.…”

Section: Introductionmentioning

confidence: 99%

A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

Guo

Zhang

et al. 2022

Sensors

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The capacitive pressure sensor based on thin film elastic deflection and a parallel plate capacitor uses a non-conductive elastic annular thin film centrally connected to a conductive, rigid, flat, concentric-circular thin plate as a pressure sensing unit. On application of pressure, the non-conductive thin film deflects elastically, which in turn moves the conductive thin plate (as a movable upper electrode plate of the parallel plate capacitor) towards the lower electrode plate, resulting in a change in the capacitance of the capacitor. Therefore, the applied pressure can be determined by measuring the capacitance change, based on the closed-form solution for the elastic behavior of the annular thin film under pressure. Such capacitive pressure sensors are more suitable for large-sized sensors such as those used for building-facade wind pressure measurements, etc. In this paper, a further theoretical study of such capacitive pressure sensors is presented. The newly presented, more refined closed-form solution can greatly reduce the output pressure error under the same input capacitance, in comparison with the previously presented closed-form solution. A numerical example of how to use the resulting closed-form solution to numerically calibrate input–output characteristics is given for the first time. The variation trend of pressure operation ranges and input–output characteristics with important parametric variations, which can be used for guiding the design of such capacitive pressure sensors, is investigated.

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Circular diaphragm-based MOEMS pressure sensor using ring resonator

Cited by 12 publications

References 30 publications

Pressure Sensing Using a Two-Dimensional Photonic Crystal Sensor

Pressure Sensing Using a Two-Dimensional Photonic Crystal Sensor

Polymer Conductive Membrane-Based Non-Touch Mode Circular Capacitive Pressure Sensors: An Analytical Solution-Based Method for Design and Numerical Calibration

A Further Theoretical Study of Capacitive Pressure Sensors Based on Thin Film Elastic Deflection and Parallel Plate Capacitor: Refined Closed-Form Solution and Numerical Calibration

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