Chromatic information coding in optical systems for hyperspectral imaging and chromatic confocal sensing

Hillenbrand, Matthias; Grewe, Adrian; Bichra, Mohamed; Mitschunas, Beate Dr.-Ing.; Kirner, Raoul; Weiss, Robert E.; Sinzinger, Stefan

doi:10.1117/12.981147

Cited by 7 publications

(9 citation statements)

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“…The chromatic confocal metrology 1 , 2 (CCM) technique eliminates a couple of fundamental disadvantages of conventional confocal scanning microscopes (CSM) and is nowadays a widely established metrology technique in industry and biomedical applications. By encoding the axial depth information into the frequency or wavelength domain of the utilized light source (LS), through the use of a hyperchromatic objective, 3 – 8 the necessity for an axial depth scan is removed, and therefore, the surface height information can be reconstructed from a single measurement.…”

Section: Introductionmentioning

confidence: 99%

Toward areal chromatic confocal metrology

2023

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Chromatic confocal metrology suffers from a limitation in the number of measurement points that can be measured simultaneously in a single frame acquisition. We propose chromatic confocal areal metrology (ChromaCAM), in which the surface height for each point in a 2D grid of measurement spots, generated by a rectangular micro-lens array, is parallely analyzed through the utilization of a pinhole multiplexer unit, an analog optical analysis unit, and postprocessing algorithms. An experiment shows the viability of the simultaneous acquisition of multiple measurement points and the advantages over exisiting areal chromatic confocal approaches. Compared with conventional chromatic confocal metrology, the increase in the acquisition rate is significant and enables one-shot measurements.

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Section: Introductionmentioning

confidence: 99%

Toward areal chromatic confocal metrology

2023

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“…While array sensors enable the one-shot detection of three-dimensional geometries, point and line sensors can provide three-dimensional information through a lateral scanning motion. In chromatic confocal hyperspectral imaging (CC-HSI) a polychromatic optical signal is spectrally analyzed with a matrix spectrometer [10][11][12] or with a tunable chromatic confocal system [13][14][15][16][17][18]. The tuning is either realized by altering the distance between the lens and the pinhole (array) [13][14][15][16] or by using a focus tunable hyperchromatic lens [17,18].…”

Section: Introductionmentioning

confidence: 99%

“…1(b) shows a singlepass setup used for CC-HSI. See [12] for a detailed discussion of these systems. In both cases light of only one specific wavelength is focused on the detection pinhole plane.…”

Section: Introductionmentioning

confidence: 99%

“…It has been shown that confocal and chromatic confocal systems with pinholes of finite size [2][3][4][23][24][25] and with monochromatic aberrations [2][3][4]12,26] can possess significantly different imaging properties.…”

Section: Introductionmentioning

confidence: 99%

“…Both systems are telecentric and are shown without the illumination and detection groups. The complete systems are discussed in[12]. (c) Geometric light cone incident upon the detection pinhole array.…”

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Spectral characteristics of chromatic confocal imaging systems

et al. 2014

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We present signal-generation models for chromatic confocal imaging systems with illumination and detection pinholes of finite size: a collinear model that considers neither aberrations nor diffraction effects, a geometrical model that accounts for aberrations, and a wave optical model covering both aberrations and diffraction effects. These models are aimed at describing the spectral response of multipoint sensor systems with field-dependent aberrations and vignetting effects. They are suitable for single- and double-pass systems with either diffusely or specularly reflecting surfaces under test. We show experimental results to verify our models.

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Linear micromechanical stepping drive for pinhole array positioning

Endrödy

Mehner

Grewe

et al. 2015

J. Micromech. Microeng.

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A compact linear micromechanical stepping drive for positioning a 7 × 5.5 mm2 optical pinhole array is presented. The system features a step size of 13.2 µm and a full displacement range of 200 µm. The electrostatic inch-worm stepping mechanism shows a compact design capable of positioning a payload 50% of its own weight. The stepping drive movement, step sizes and position accuracy are characterized. The actuated pinhole array is integrated in a confocal chromatic hyperspectral imaging system, where coverage of the object plane, and therefore the useful picture data, can be multiplied by 14 in contrast to a non-actuated array.

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Chromatic information coding in optical systems for hyperspectral imaging and chromatic confocal sensing

Cited by 7 publications

References 0 publications

Toward areal chromatic confocal metrology

Toward areal chromatic confocal metrology

Spectral characteristics of chromatic confocal imaging systems

Linear micromechanical stepping drive for pinhole array positioning

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