Chromatic confocal coherence scanning interferometry with speed-variable scanning method to measure large-depth step
Yulu Zhao,
Songtao Chang,
Yi Zhang
et al.
Abstract:Coherence Scanning Interferometry (CSI) is a crucial measurement technique for achieving non-contact, rapid, and high-precision measurements. However, when applied to large-depth steps, CSI encounters challenges related to prolonged measurement times and suboptimal signal utilization. This paper introduces a hybrid CSI system that integrates the Chromatic Confocal technique (CC-CSI). The confocal spectral signal peak facilitates the rapid determination of the coherence area, allowing the scanning process to be… Show more
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