Choice of insulation materials and its effect on the performance of square microhotplate

Saxena, Gaurav; Paily, Roy

doi:10.1007/s00542-013-2022-6

Cited by 3 publications

(1 citation statement)

References 30 publications

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“…Low-stress nitride (Si x N y ) or oxide/nitride/oxide (ONO) layer [ 63 , 72 , 73 , 74 ] is preferred for their low residual stress and good adhesion to metal. Except for nitride and oxide, silicon carbide is also explored as the alternative passivation material by Saxena et al [ 75 ]. A reduced thickness of the material is required to achieve similar thermal behavior, however, the nitride layer is still preferred because of the low cost and simplicity of the CMOS processes.…”

Section: Mems Microhotplatementioning

confidence: 99%

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Liu

Zhang

et al. 2018

Micromachines

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The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

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Section: Mems Microhotplatementioning

confidence: 99%