2020
DOI: 10.1109/jlt.2020.3002552
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Chip-Scale Silicon Ring Resonators for Cryogenic Temperature Sensing

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Cited by 22 publications
(5 citation statements)
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“…The experimental results indicated that the temperature sensitivity is 293.9 pm/°C, which is 6.3 times high- In terms of structures, MZI and MRR are the two fundamental structures of planar optical waveguide temperature sensors. The microring structure is shown in Figure 8a, which has the advantages of miniaturization and high sensitivity [87,88]. In 2010, Gun-Duk Kim et al used silicon to create an ultrasmall photonic temperature sensor with an MRR structure [89].…”
Section: Thermo-optic Temperature Sensorsmentioning
confidence: 99%
“…The experimental results indicated that the temperature sensitivity is 293.9 pm/°C, which is 6.3 times high- In terms of structures, MZI and MRR are the two fundamental structures of planar optical waveguide temperature sensors. The microring structure is shown in Figure 8a, which has the advantages of miniaturization and high sensitivity [87,88]. In 2010, Gun-Duk Kim et al used silicon to create an ultrasmall photonic temperature sensor with an MRR structure [89].…”
Section: Thermo-optic Temperature Sensorsmentioning
confidence: 99%
“…At an individual device level, measurements using side-of-fringe constant power mode, it has been shown that a noise floor below 100 µK is achieved using a free running laser [26]. Using wavelength-swept methods, measurements from cryogenic temperatures to above room temperatures have been demonstrated [26,149]. Packaging of the RR in a practical thermometer was reported to degrade the performance [22], however one of the possible reasons in that case was likely a residual porosity of the silicon-dioxide cladding layer and, as a result, sensitivity to the humidity.…”
Section: Ring-resonator (Rr) Thermometrymentioning
confidence: 99%
“…Micro-ring resonators are widely used in optical filters [6][7][8] , micro-ring lasers [9,10] , optical switches [11] , and micro-ring sensors [12][13][14][15][16][17] due to their high-quality factor (Q factor), high sensitivity, and easy integration. In recent years, based on the research on micro-ring resonators, the sensitivity and output power of optical biosensors based on micro-ring resonators have been improved by the Vernier effect [18,19] .…”
Section: Introductionmentioning
confidence: 99%