Chip-scale aerosol impactor with integrated resonant mass balances for real time monitoring of airborne particulate concentrations

Maldonado-Garcia, M.; Mehdizadeh, Esmaeil; Kumar, Vineet; Wilson, J. C.; Pourkamali, Siavash

doi:10.1109/memsys.2015.7051101

Cited by 7 publications

(5 citation statements)

References 6 publications

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“…7 shows photographs of the instrument with the electrothermal cantilever in an enlarged representation (a) as well as the schematics of its components, i.e., an improved sampling head and a base unit comprising an EP voltage supply, frequency-tracking electronics, a microcontroller (e. g., for switching control between the sampling and frequencymeasuring modes), a liquid crystal display (LCD), a battery pack, and a data storage card (mSD). An impactor was added and placed immediately behind the microfilter as a second large particle cancellation stage, which was designed to have a cut-off size of d p < 1 mm for the particles that can enter the sampling stage [16].…”

Section: Enhanced Componentsmentioning

confidence: 99%

“…Correspondingly, nano string resonators on which NPs can be trapped by impaction still require external vibration excitation using a shaker and detection using a laser Doppler vibrometer [15]. Furthermore, the impaction process of NPs on a MEMS resonator needs partial vacuum for large-enough air flow velocity (1350 m/s), which so far can only be realized using external pumps [16].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

Wasisto

Uhde

Peiner

2016

Building and Environment

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Section: Enhanced Componentsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

Wasisto

Uhde

Peiner

2016

Building and Environment

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“…Further process details are provided in [4]. The chip-scale impactors fabricated for both stages are shown in the SEM images of The resonators will function as mass balances and their frequency shifts will be monitored during particle collection [4,5]. The collected particulate mass will be obtained from the measured frequency shifts according to equation 1:…”

Section: A Chip-scale Particle Impactor Fabrication With Integrated mentioning

confidence: 99%

“…In addition to extreme miniaturization, on-chip integration eliminates the need for high precision placement of the resonator under the off-chip nozzle. For the chip-scale impactor the nozzle is formed on the chip with high precision during the microfabrication process [4]. This work presents a two stage cascade assembly and measurement results for such chip-scale impaction stages (Fig.…”

Section: Introductionmentioning

confidence: 99%

Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

et al. 2015

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This work presents integration of two chip-scale realtime aerosol impactor stages within a miniaturized cascade assembly for airborne particulate size segregation and mass concentration measurement. Impaction stages, each comprised of a MEMS resonant microbalance, an impaction micro-chamber and a number of micro-nozzles, all integrated on a single chip, are fabricated using a three mask micromachining process on SOI substrates. Tests were performed in different environments with different particle mass concentrations ranging from 0.012 to 0.13 μg/m 3 (particles larger than ~ 9 nm) show a clear correlation between the resonator response and the expected particle concentrations. SEM images of the deposited particles clearly show a size difference between particles collected in the two stages.

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“…This compromises the possibility of real time measurement. Recent advancements on mass concentration measurement mainly concern miniaturization allowing the design of chip scale devices [ 11 , 12 , 13 , 14 ]. Instruments based on a gravimetric principle may require the use of complex electronic circuitry such as high frequency signal generation and acquisition.…”

Section: Introductionmentioning

confidence: 99%

Real Time Cascade Impactor Based On Surface Acoustic Wave Delay Lines for PM10 and PM2.5 Mass Concentration Measurement

Djoumi¹,

Vanotti²,

Blondeau-Pâtissier³

2018

Sensors

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In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate. The Love waves are guided on the substrate’s surface using a silica layer. SAW sensors themselves are not capable to discriminate particles by their size, therefore, particle separation based on aerodynamic diameter is achieved using a 3 Lpm dedicated cascade impactor. The latter was designed to integrate the SAW sensors which are monitored using a phase shift measurement. The collected particles impact on the acoustic sensor’s surface inducing a gravimetric effect that modifies the acoustic wave propagation conditions. The resulted phase shift allows the measurement of the mass deposited on the sensitive zone. The novel cascade impactor with SAW sensors as particle collecting stages is exposed to different aerosols in the 0–150 μg/m3 concentration range and proved to be able to detect and differentiate particles based on their size in real time. The system’s response was compared to a commercial optical counter based on light scattering technology and was found to be in good agreement with it.

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Chip-scale aerosol impactor with integrated resonant mass balances for real time monitoring of airborne particulate concentrations

Cited by 7 publications

References 6 publications

Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

Miniaturized two stage aerosol impactor with chip-scale stages for airborne particulate size separation

Real Time Cascade Impactor Based On Surface Acoustic Wave Delay Lines for PM10 and PM2.5 Mass Concentration Measurement

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