2012
DOI: 10.1002/chin.201210224
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ChemInform Abstract: Laser‐Induced Chemical Liquid Phase Deposition of Metals: Chemical Reactions in Solution and Activation of Dielectric Surfaces

Abstract: C h emIn fo rm 2 0 1 2 , 4 3 , issu e 1 0 © 2 0 1 2 Wiley -VCH Verl ag G m b H & Co. K G a A , We i n he i m Inorga nic che mistry Z 010 0 DOI: 1 0.100 2/ch in.201 2102 24 L a se r-Induce d Che mical L iquid Phase Deposition o f M e tals: Chemi cal R ea ct ions in Solution a nd Ac t iv ation of Diele ctric Surfac es -[9 2r ef s . ] . -( KO CH E M IRO V S KY, V. A . ; M E NC HI KO V, L . G. ; S AF O NO V, S . V. ; BA L ' M AK OV, M . D .; TUMK IN , I. I .; T VER ' YA N OV ICH , Y. S.; R us s. C hem . R ev. (E n… Show more

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“…Such structures can find application in many fields of technology, such as in microelectronics, optoelectronics, micromechanics especially for sensor and actuator devices. One possibility to deposit such structures is laser-induced chemical liquid-phase deposition (LCLD) [1,2], a simple and cost-effective deposition method, where neither expensive vacuum exhaust and gas systems, nor spin-on, active site seeding or mask projection processes are required. In addition the components are affordable and easy to handle.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Such structures can find application in many fields of technology, such as in microelectronics, optoelectronics, micromechanics especially for sensor and actuator devices. One possibility to deposit such structures is laser-induced chemical liquid-phase deposition (LCLD) [1,2], a simple and cost-effective deposition method, where neither expensive vacuum exhaust and gas systems, nor spin-on, active site seeding or mask projection processes are required. In addition the components are affordable and easy to handle.…”
Section: Introductionmentioning
confidence: 99%
“…In addition the components are affordable and easy to handle. LCLD is a wellknown technique and is applied for a long time already [1][2][3][4][5][6][7][8][9]. In recent work, our group investigated an ablation technique called laser induced backside wet etching (LIBWE) [10,11].…”
Section: Introductionmentioning
confidence: 99%