ChemInform Abstract: KINETICS OF DISSOCIATION OF SEMICONDUCTOR PHASES CONTAINING VOLATILE COMPONENTS

Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

“…Nevertheless, phase diagrams of the involved three binary end-member systems, namely, Ge-Si, Ge-P and Si-P, have been experimentally and thermodynamically studied. 2,3,[17][18][19][20][21][22][23][24][25][26] The Ge-Si system has a continuous solid solution phase diagram. The first review and thermodynamic evaluation of its phase equilibria was reported by Olesinski et al 17 Then in 1992, Bergman et al 18 determined the partial enthalpy of Si in the Si-Ge liquid state at 1327 K in the concentration range of 0 < x Si < 0.03.…”

“…Although the sample preparation process has been introduced in detail by Goncharov et al, 24 they did not clarify whether the constructed T − x phase diagram of Ge-P was referring to a constant pressure. In their later publication, 25 in addition to the DTA results, they have reported the data measured via a static manometric method. Based on the measured data and thermodynamic analysis of the interaction of components, Ugai et al 25 constructed the pressure-temperature-composition (P − T − x) diagram of the Ge-P binary system that was projected on the T − x, P − T and P − x planes.…”

“…In their later publication, 25 in addition to the DTA results, they have reported the data measured via a static manometric method. Based on the measured data and thermodynamic analysis of the interaction of components, Ugai et al 25 constructed the pressure-temperature-composition (P − T − x) diagram of the Ge-P binary system that was projected on the T − x, P − T and P − x planes. The solid solubility of P in Ge_diamond has been determined by means of microhardness measurements 26 and Hall effect measurements.…”

“…Thermodynamic properties of GeP have been relatively well studied. [29][30][31][32][33][34][35][36][37][38][39] Ugai et al 31 measured the low temperature heat capacity of GeP by means of a calorimeter in temperature range of 6.99-304.83 K. The high temperature heat capacity of GeP has never been experimentally measured. The C p expression of GeP above room temperature was estimated in literature.…”

“…Olesinski et al 40 summarized and reviewed the phase equilibria [24][25][26][27][28] and thermodynamic properties [29][30][31][32] of the Ge-P system that were published before 1985. They assessed the steady-state temperature-composition (T − X) phase diagram of Ge-P at 4600 kPa 40 with respect to the reported data in literature.…”