ChemInform Abstract: High‐Temperature Wet Chemical Etching of Ta<sub>2</sub>O<sub>5</sub> in NaOH‐Based Solutions for Fabricating Antiresonant Reflecting Optical Waveguides.

Chuang, M.J.; Hsieh, Kuang-Yeu; Chu, A.K.

doi:10.1002/chin.199821229

“…Therefore, it is desired to find low-cost solutions to etch waveguide materials. Wet-chemical etching is one of the economical methods for the development of photonic circuits [29]. Though, the optical films structured with this practice offer rounded side walls due to the isotropic nature of etching [30].…”

Section: Introductionmentioning

confidence: 99%

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Butt¹,

Kozłowski²,

2023

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In this work, a modal analysis of reverse rib waveguide (RRW) structures based on a silica-titania platform is carried out. The silica-titania waveguide films can be deposited via the sol-gel method and dip-coating technique. To combine this low-cost deposition technique with the economical fabrication method, we propose to structure the samples via wet-chemical etching. Due to the isotropic nature of wet etching, the waveguide architecture with rounded sidewalls is considered to model the RRW. Additionally, the modal conditions and bending loss are compared with the RRW with vertical sidewalls. It is assumed that this study will be beneficial for comprehending the modal conditions of waveguide structures with perfectly vertical and rounded sidewalls.

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Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Butt¹,

Kozłowski²,

Piramidowicz³

2023

Preprint

0

View full text Add to dashboard Cite

In this work, a modal analysis of reverse rib waveguide (RRW) structures based on a silica-titania platform is carried out. The silica-titania waveguide-films can be deposited via the sol-gel method and dip-coating technique. To combine this low-cost deposition technique with the economical fabrication method, we propose to structure the samples via wet-chemical etching. Due to the isotropic nature of wet etching, the waveguide architecture with rounded side walls is considered to model RRW. Additionally, the modal conditions and bending loss are compared with the RRW with vertical side walls. It is assumed that this study will be beneficial for comprehending the modal conditions of waveguide structures with perfectly vertical and rounded side walls.

show abstract

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Butt¹,

Kozłowski²,

Piramidowicz³

2023

Preprint

0

View full text Add to dashboard Cite

In this work, a modal analysis of reverse rib waveguide (RRW) structures based on a silica-titania platform is carried out. The silica-titania waveguide-films can be deposited via the sol-gel method and dip-coating technique. To combine this low-cost deposition technique with the economical fabrication method, we propose to structure the samples via wet-chemical etching. Due to the isotropic nature of wet etching, the waveguide architecture with rounded side walls is considered to model RRW. Additionally, the modal conditions and bending loss are compared with the RRW with vertical side walls. It is assumed that this study will be beneficial for comprehending the modal conditions of waveguide structures with perfectly vertical and rounded side walls.

show abstract

ChemInform Abstract: High‐Temperature Wet Chemical Etching of Ta₂O₅ in NaOH‐Based Solutions for Fabricating Antiresonant Reflecting Optical Waveguides.

Cited by 3 publications

References 1 publication

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

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ChemInform Abstract: High‐Temperature Wet Chemical Etching of Ta2O5 in NaOH‐Based Solutions for Fabricating Antiresonant Reflecting Optical Waveguides.

Cited by 3 publications

References 1 publication

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Numerical scrutiny of a silica-titania-based reverse rib waveguide with vertical and rounded sidewalls

Contact Info

Product

Resources

About

ChemInform Abstract: High‐Temperature Wet Chemical Etching of Ta₂O₅ in NaOH‐Based Solutions for Fabricating Antiresonant Reflecting Optical Waveguides.