ChemInform Abstract: CVD of Ag^I Complexes with Tertiary Phosphines and Perfluorinated Carboxylates — A New Class of Silver Precursors.

Abstract

CVD of Ag I Complexes with Tertiary Phosphines and Perfluorinated Carboxylates -A New Class of Silver Precursors.-Thin Ag films are prepared by CVD in the temperature range 493-623 K using C 2 F 5 COOAgPMe 3 (I) and C 2 F 5 COOAg (II) as precursors. The films are characterized by XRD, SEM, STEM, XPS, and temperature variable IR spectroscopy. The results reveal the influence of the tertiary phosphine on the morphology of the layers deposited. The variation of film morphology can be related to the sublimation and thermal decomposition mechanisms of (I) and (II). Temperature and deposition time are the main factors affecting the quality of films. In comparison to known CVD precursors compounds (I) and (II) have the advantages of lower decomposition temperature at smaller vacuum (4 mbar), and a shorter deposition time. -