2005
DOI: 10.1109/jsen.2005.848139
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Chemical warfare agent detection using MEMS-compatible microsensor arrays

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Cited by 31 publications
(15 citation statements)
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“…Thus far, numerous techniques have been developed for the detection of these nerve agents, as well as their degradation products and simulants. These include gas chromatography [3], liquid chromatography [4], ion chromatography [5], capillary electrophoresis [6], gas chromatography-mass spectrometry [7,8], liquid chromatographymass spectrometry [9], quartz-crystal microbalance [10], surface acoustic wave [11,12], metal oxide semiconductor [13,14], functionalized liquid crystal [15], microcantilever [16], interferometry [17], enzymatic assays [18][19][20], molecularly imprinted polymers [21], colorimetric method [22], fluorescent detection [23,24], electrochemical analysis [25,26], sensor array [27,28], and lab-on-chip technique [29]. However, the technology currently available is certainly not compatible with our needs in terms of sensitivity, selectivity, portability, low cost, ease of use, and rapid response [21,30].…”
Section: Introductionmentioning
confidence: 99%
“…Thus far, numerous techniques have been developed for the detection of these nerve agents, as well as their degradation products and simulants. These include gas chromatography [3], liquid chromatography [4], ion chromatography [5], capillary electrophoresis [6], gas chromatography-mass spectrometry [7,8], liquid chromatographymass spectrometry [9], quartz-crystal microbalance [10], surface acoustic wave [11,12], metal oxide semiconductor [13,14], functionalized liquid crystal [15], microcantilever [16], interferometry [17], enzymatic assays [18][19][20], molecularly imprinted polymers [21], colorimetric method [22], fluorescent detection [23,24], electrochemical analysis [25,26], sensor array [27,28], and lab-on-chip technique [29]. However, the technology currently available is certainly not compatible with our needs in terms of sensitivity, selectivity, portability, low cost, ease of use, and rapid response [21,30].…”
Section: Introductionmentioning
confidence: 99%
“…This mode has been frequently used in prior exploratory studies designed to characterize both materials and analyte responses as well as cross-talk between sensing elements in the same array (13,15). Figure 5 (16) shows an example of an FTS plot for two sensors (one SnO 2 , the other TiO 2 ) exposed to the nerve agent GB (sarin) at a series of concentrations. This simple experiment shows that both the highly resistive TiO 2 and the more conductive SnO 2 are sensitive to sublethal concentrations of sarin [the 30-min median lethal concentration of GB is 800 nmol mol −1 (17)].…”
Section: Fixed-temperature Sensingmentioning
confidence: 99%
“…The nanoparticle film is deposited over a microhotplate (mHP) fabricated by microelectromechanical system (MEMS) technology employing microfabrication and micromachining processes 51 . It consists of a polysilicon meander heater over a silicon dioxide-silicon nitride platform (Fig.…”
Section: Metal Oxide Nanoparticle-based Chemiresistor Sensorsmentioning
confidence: 99%