2004
DOI: 10.1016/j.surfcoat.2003.10.144
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Chemical vapour deposition of PyC–SixCy–SiC–Si3N4 multilayer with graded C…SiC transition

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Cited by 7 publications
(8 citation statements)
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“…1 In the case of Si bands at 520 cm 21 there is no evidence of the presence of such a band in the spectrum. The high intensity of the sp 3 /sp 2 (1350 : 1580) doublet at the beginning of the graded layer indicates an excess of carbon and therefore the layer is not stoichiometric.…”
Section: Resultsmentioning
confidence: 96%
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“…1 In the case of Si bands at 520 cm 21 there is no evidence of the presence of such a band in the spectrum. The high intensity of the sp 3 /sp 2 (1350 : 1580) doublet at the beginning of the graded layer indicates an excess of carbon and therefore the layer is not stoichiometric.…”
Section: Resultsmentioning
confidence: 96%
“…Chemical concentration, gas flow and temperature were controlled, leading to the deposition of PyC (as a bonding layer) and graded Si x C y as described in Ref. 1. After the deposition, the sample was cut so that a cross-section was exposed.…”
Section: Sample Preparationmentioning
confidence: 99%
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“…[2,3]. The techniques for fabrication of functionally graded materials include chemical vapor deposition (CVD), physical vapor deposition, plasma spray, powder metallurgy and sol-gel techniques [4][5][6][7][8][9]. TiC x N 1Àx coatings deposited on WC/Co, graphite and steel by CVD have been used in many areas ranging from cutting tools to nuclear materials owing to high hardness, superior inertness and low Z-number.…”
Section: Introductionmentioning
confidence: 99%