Chemical Vapor Deposition Syntheses of Wafer‐Scale 2D Transition Metal Dichalcogenide Films toward Next‐Generation Integrated Circuits Related Applications

Abstract

Abstract2D semiconducting transition metal dichalcogenides (TMDCs), most with a formula of MX2 (M=Mo, W; X=S, Se, etc.), have emerged as promising channel materials for next‐generation integrated circuits, considering their dangling‐bond‐free surfaces, moderate bandgaps, relatively high carrier mobilities, etc. Wafer‐scale preparation of 2D MX2 films holds fundamental significance for realizing their applications. Chemical vapor deposition (CVD) is recognized as the most promising method for preparing electronic‐grade 2D MX2 films. This review hereby summarizes the recent progress in CVD syntheses of wafer‐scale 2D MX2 films and their applications in logic operations, data storage, and image capturing/processing related fields. The first part focuses on the wafer‐scale syntheses of 2D MX2 films through designing homogeneous metal precursor supply routes (e.g., precoating soluble precursor, feeding gaseous precursor, designing independent multisource supply or face‐to‐face metal precursor supply routes). The second part highlights the epitaxial growth of monolayer MX2 single crystals on single‐crystal Au substrates and well‐designed sapphire substrates. The third part introduces various functional device/circuit related applications of CVD‐derived 2D MX2 wafers. Finally, challenges and prospects are discussed from the viewpoints of the controlled synthesis, reliable characterization, and damage‐free transfer of 2D MX2, as well as the fabrication and integration of high‐performance devices.

Two-dimensional materials for future information technology: status and prospects

“…It generally involves chemical reactions occurring in the gas atmosphere or at the gas/solid interface, to form the desired materials on heated substrates. In the last decade, CVD has been rapidly developed as a powerful synthetic route for achieving high-quality 2D TMDs [32,33]. The lateral size, thickness, and morphology of CVD-synthesized 2D TMDs can be well controlled through altering the synthetic processes.…”