Chemical Vapor Deposition of Large-Size Monolayer MoSe₂ Crystals on Molten Glass

Abstract

We report the fast growth of high-quality millimeter-size monolayer MoSe crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm/(V·s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).

P‐GaSe/N‐MoS2 Vertical Heterostructures Synthesized by van der Waals Epitaxy for Photoresponse Modulation

“…Considering the importance of sample uniformity to practical applications, we have made more attempts for improving the growth, for example, suppression of the amount of source (Figure S2, Supporting Information) and introduction of inner tube (Figure S3c, Supporting Information), which give a limited improvement on result. To further improve the uniformity, we will try to employ space‐confined strategy for growth, which benefit to produce large‐area and high quality thin flakes with the unprecedented uniformity and controllability . It is easy to find that GaSe flakes are inclined to deposit on the surface of MoS 2 and only a few small irregular microstructures can be found on the bare SiO 2 /Si substrate, which suggests the precursor has a lower nucleation and migration energy barrier on MoS 2 than on SiO 2 /Si substrate (Figures S3 and S4, Supporting Information) .…”

Platform for nodal topological superconductors in monolayer molybdenum dichalcogenides

“…Finally, we address experimental feasibility. It is possible to produce high-quality monolayer MoX 2 crystals with low impurity densities, and sizes in the tens of microns or even millimeters [62][63][64][65]. Such large samples may guarantee that the topological Andreev edge states at opposing edges are well separated.…”

2 D Materials for Electrochemical Energy Storage: Design, Preparation, and Application

“…Chen et al. achieved millimeter‐size monolayer MoSe 2 and MoS 2 crystals with molten glass as growth substrates . The isotropic surface of molten glass suppressed nucleation events and greatly improved the growth of large crystalline domains.…”

“…[43] NH 4 Cl promoter can react with Ti powders and switch the solid-phases ulfurization reaction into aC VD process, thus enablingt he controllability.C hen et al achieved millimeter-size monolayer MoSe 2 and MoS 2 crystals with molteng lass as growth substrates. [44] The isotropic surface of molteng lass suppressed nucleation events and greatlyi mproved the growth of large crystalline domains. When the precursor is am etal-organic compound, the CVD process can be defined as am etalorganic CVD method.…”