Chemical Vapor Deposition of Homoepitaxial Diamond Films

Teraji, Tokuyuki

doi:10.1002/9783527623174.ch3

Cited by 9 publications

(6 citation statements)

References 103 publications

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“…For this reason, the CVD method using non-equilibrium plasma is widely used in diamond thin film growth to decrease the substrate temperature (figure 2 a , b ). The diamond crystal growth mechanism by this plasma-assisted CVD method and the dependence of diamond growth mode on the growth parameters are described, for example, in the following papers [22,23]. Using diamond single crystals as a substrate, it is possible to obtain functional single-crystal thin films with unique doping and stacking structures.…”

Section: Diamond Growth Technologymentioning

confidence: 99%

Nitrogen concentration control during diamond growth for NV ⁻ centre formation

Teraji,

Shinei,

Masuyama

et al. 2023

Phil. Trans. R. Soc. A.

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Negatively charged nitrogen-vacancy (NV − ) centres formed in diamond crystals are point defects that have potential applications in various quantum devices such as highly sensitive magnetic sensors. To improve the sensitivity of magnetic sensors using NV − centres, it is essential to precisely control the nitrogen concentration in the crystals. In this paper, we demonstrated that nitrogen concentration in diamond can be controlled with high precision for the following two representative growth methods. One is the high-pressure/high-temperature (HPHT) synthesis method and the other is the chemical vapour deposition (CVD) method. The nitrogen concentration of HPHT-grown diamond decreased semi-logarithmically with increasing contents of titanium or aluminium as nitrogen getter materials. The nitrogen concentration of CVD-grown diamond increased linearly with increasing the flow rate ratio of nitrogen to carbon. NV − centres were formed by controlling the total fluence of electron beams so that approximately 20% of the nitrogen became NV − centres. The coherence time of electron spin of NV − centres obtained by the Hahn-echo pulse sequence T 2 of these diamond crystals was inversely proportional to the nitrogen concentration. A comparison of T 2 of the NV − centres for HPHT-synthesized and CVD-grown diamonds showed no significant difference between them. This article is part of the Theo Murphy meeting issue ‘Diamond for quantum applications’.

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Section: Diamond Growth Technologymentioning

confidence: 99%

Nitrogen concentration control during diamond growth for NV ⁻ centre formation

Teraji,

Shinei,

Masuyama

et al. 2023

Phil. Trans. R. Soc. A.

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“…Unfortunately, this relatively straightforward approach to engineer optically isolated photonic structures does not translate effectively to the fabrication of diamond. Despite immense progress in the field of diamond growth, heteroepitaxial single-crystal thin films of diamond cannot yet be produced with defects at or below the parts-per-billion level, as required for quantum optical experiments involving single emitters [280][281][282][283][284]. Additionally, diamond is resilient to all forms of wet etching.…”

Section: A Fabrication Techniquesmentioning

confidence: 99%

Cavity quantum electrodynamics with color centers in diamond

Janitz

Bhaskar

Childress

2020

Optica

106

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Coherent interfaces between optical photons and long-lived matter qubits form a key resource for a broad range of quantum technologies. Cavity quantum electrodynamics (cQED) offers a route to achieve such an interface by enhancing interactions between cavity-confined photons and individual emitters. Over the last two decades, a promising new class of emitters based on defect centers in diamond have emerged, combining long spin coherence times with atom-like optical transitions. More recently, advances in optical resonator technologies have made it feasible to realize cQED in diamond. This article reviews progress towards coupling color centers in diamond to optical resonators, focusing on approaches compatible with quantum networks. We consider the challenges for cQED with solid-state emitters and introduce the relevant properties of diamond defect centers before examining two qualitatively different resonator designs: micron-scale Fabry-Perot cavities and diamond nanophotonic cavities. For each approach, we examine the underlying theory and fabrication, discuss strengths and outstanding challenges, and highlight state-of-the-art experiments.

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“…The CVD technique operates at pressures lower than atmospheric pressures (10-300 mbar), under conditions at which graphite should be in the thermodynamically stable phase [91][92][93]. It involves kinetically stabilizing diamond through the production of atomic hydrogen within a high temperature plasma medium that preferentially etches away weak sp 2 bonds, allowing the addition of carbon to the diamond lattice of the substrate.…”

Section: Cvd Grown Diamondsmentioning

confidence: 99%

Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications

Achard¹,

Jacques²,

Tallaire³

2020

J. Phys. D: Appl. Phys.

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Diamond is a host for a wide variety of colour centres that have demonstrated outstanding optical and spin properties. Among them, the nitrogen-vacancy (NV) centre is by far the most investigated owing to its superior characteristics, which promise the development of highly sophisticated quantum devices, in particular for sensing applications. Nevertheless, harnessing the potential of these centres mainly relies on the availability of high quality and purity diamond single crystals that need to be specially designed and engineered for this purpose. The plasma assisted Chemical Vapour Deposition (CVD) has become a key enabling technology in this field of research. Nitrogen can indeed be directly in-situ doped into a high crystalline quality diamond matrix in a controlled way allowing the production of single isolated centres or ensembles that can potentially be integrated into a device.In this paper we will provide an overview on the requirements for synthesizing "quantum-grade" diamond films by CVD. These include the reduction of impurities and surrounding spins that limit coherence times, the control of NV density in a wide range of concentrations as well as their spatial localization within the diamond. Enhancing the charge state and preferential orientation of the colour centres is also discussed. These improvements in material fabrication have contributed to position diamond as one of the most promising solid-state quantum system and the first industrial applications in sensing are just starting to emerge.

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Chemical Vapor Deposition of Homoepitaxial Diamond Films

Cited by 9 publications

References 103 publications

Nitrogen concentration control during diamond growth for NV ⁻ centre formation

Nitrogen concentration control during diamond growth for NV ⁻ centre formation

Cavity quantum electrodynamics with color centers in diamond

Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications

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Chemical Vapor Deposition of Homoepitaxial Diamond Films

Cited by 9 publications

References 103 publications

Nitrogen concentration control during diamond growth for NV − centre formation

Nitrogen concentration control during diamond growth for NV − centre formation

Cavity quantum electrodynamics with color centers in diamond

Chemical vapour deposition diamond single crystals with nitrogen-vacancy centres: a review of material synthesis and technology for quantum sensing applications

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Nitrogen concentration control during diamond growth for NV ⁻ centre formation

Nitrogen concentration control during diamond growth for NV ⁻ centre formation