Chemical vapor deposition of C-F low-k materials

Uhlig, M.; Geßner, Thomas

doi:10.1016/b978-012511221-5/50009-x

Interlayer Dielectrics for Semiconductor Technologies 2003

DOI: 10.1016/b978-012511221-5/50009-x

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Chemical vapor deposition of C-F low-k materials

M. Uhlig¹,

Thomas Geßner²

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Chemical vapor deposition of C-F low-k materials

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References 24 publications

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