“…Phenomena which occurred'during annealing are very complicated and not yet completely understood. The changes in film properties depended on the conditions of preparation (the kind and the temperature of substratea, 22,and the quality of dopants 2's,, 23,35,3s,39,5 and the other factors suitable to the deposition method) and on the conditions of annealing especially the range of temperature, time period and gaseous atmosphere (air 6'7' 14' 17'22'23'25, 32'35' 37,38,41,45,46 oxygen s'7'26'29'3'33'34 argon17'23, nitrogen7'23'2s '43, vacuum17'23'24'29'31'37'38, hydrogen22,23). Mainly '3-46 or variations in structure7).…”