2022
DOI: 10.1016/j.isci.2022.103832
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Chemical vapor deposition of 2D materials: A review of modeling, simulation, and machine learning studies

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Cited by 52 publications
(27 citation statements)
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References 172 publications
(273 reference statements)
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“…As briefly anticipated in the introduction, ML can be a powerful tool for material science and design, owing to its ability to efficiently find patterns and trends, handle multidimensional and heterogeneous data and improve continuously with access to more observations-all while being intrinsically and fully automatable. Models and simulations based on ML approaches can, for instance, quickly narrow down the parameter space of specific variables involved in fabrication processes [18,181,182]. They can also be used to control, tweak or even design ad hoc properties of materials [131], heterostructures [9,132] and devices [19, 136,137], again while being suitable for fabrication strategies that require large-scale, fast and automated production.…”
Section: Color Center Synthesis and Stabilitymentioning
confidence: 99%
“…As briefly anticipated in the introduction, ML can be a powerful tool for material science and design, owing to its ability to efficiently find patterns and trends, handle multidimensional and heterogeneous data and improve continuously with access to more observations-all while being intrinsically and fully automatable. Models and simulations based on ML approaches can, for instance, quickly narrow down the parameter space of specific variables involved in fabrication processes [18,181,182]. They can also be used to control, tweak or even design ad hoc properties of materials [131], heterostructures [9,132] and devices [19, 136,137], again while being suitable for fabrication strategies that require large-scale, fast and automated production.…”
Section: Color Center Synthesis and Stabilitymentioning
confidence: 99%
“…In thin film processing, machine-learning methods have been successfully employed to improve materials growth, lithography, and etching steps. For materials growth, use of the data sciences to improve the quality of grown materials has become a field in itself . To cite a representative example, Bayesian optimization can be used to identify material growth parameters in just a few trials that yield optimal films with virtually no porosity (Figure a).…”
Section: Fabrication Of Freeform Devicesmentioning
confidence: 99%
“…As a typical bottom-up synthesis method, CVD presents prominent advantages among the various preparation technologies for 2D materials. In addition, the well-developed derivative technologies of CVD (plasma-enhanced CVD, metal organic CVD, etc.) provide great opportunities to explore novel 2D species .…”
Section: Introductionmentioning
confidence: 99%