2006
DOI: 10.1103/physrevb.73.045302
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Chemical tuning of band alignments for metal gate/high-κoxide interfaces

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Cited by 41 publications
(29 citation statements)
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“…Thus the present less dependence of the SBH of the Si-terminated interface on the metal species should be caused by this kind of metallic features of the interfacial bond, which tends to reduce charge transfer or polarized distribution, resulting in the screening of large interface dipoles as referred as the screening by MIGS. 48) In other words, the Si-terminated interfaces seem to have features similar to metal/Si interfaces, where the SBH is known to have a smaller slope parameter in Eq. (1) in a similar manner.…”
Section: Migs Bpmentioning
confidence: 99%
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“…Thus the present less dependence of the SBH of the Si-terminated interface on the metal species should be caused by this kind of metallic features of the interfacial bond, which tends to reduce charge transfer or polarized distribution, resulting in the screening of large interface dipoles as referred as the screening by MIGS. 48) In other words, the Si-terminated interfaces seem to have features similar to metal/Si interfaces, where the SBH is known to have a smaller slope parameter in Eq. (1) in a similar manner.…”
Section: Migs Bpmentioning
confidence: 99%
“…By integrating the LDOS from the VBT to the Fermi level in each interface, one can estimate the quantity of occupied MIGS. 48) It is clear that the Si-terminated interface has more rich MIGS than the C-terminated interface in each metal system. Thus the present less dependence of the SBH of the Si-terminated interface on the metal species should be caused by this kind of metallic features of the interfacial bond, which tends to reduce charge transfer or polarized distribution, resulting in the screening of large interface dipoles as referred as the screening by MIGS.…”
Section: Migs Bpmentioning
confidence: 99%
“…Compared with semiconductor/ metal interfaces, 12) systematic investigation of the SBH of such oxide/metal interfaces are rare. [13][14][15][16][17] In this paper, we deal with the SBH of the Al 2 O 3 (0001)/ Ni(111) interface, and examine the effects of interface stoichiometry. It is easy to construct O-rich (O-terminated), stoichiometric (Al-terminated), and Al-rich (double Al-layerterminated) Al 2 O 3 (0001)/metal interfaces by changing the interface atomic plane of the Al 2 O 3 (0001) surface.…”
Section: Introductionmentioning
confidence: 99%
“…[3][4][5][6][7] The work functions of metal gates need to be near the energies of the band edges of Si (about 4.10 eV and 5.10 eV for NMOS and PMOS, respectively). 8,9 Even though there is hardly a metal gate to meet this requirement well, the work function can be tuned by some effective methods. In experiments, the alloying of binary alloys has been successfully used to modulate the work functions.…”
Section: Introductionmentioning
confidence: 99%
“…In experiments, the alloying of binary alloys has been successfully used to modulate the work functions. [9][10][11] In theories, several strategies to tune the work function have been suggested. Park et al have found that the work functions of the NiAl and PtAl systems can be significantly affected by submonolayer of an overlying metal.…”
Section: Introductionmentioning
confidence: 99%