Chemical surface modification of porous silicon with palladium and characterizations

Kanungo, J.; Maji, Subrata; Saha, Hiranmay; Basu, S.

doi:10.1016/j.mseb.2010.01.046

Cited by 22 publications

(10 citation statements)

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“…Additionally, mainly used as an insulating layer in the silicon-on-insulator [8][9] , a sensing layer in biosensors [9] or chemical sensors [10] , an energy carrier [11] , a sacrificial layer in micromachining [12] , an important material for solar cell [13] and an excellent biomaterial in tissue engineering, tumor imaging and bioreactor platform drug delivery [3,7] . However, there are few works focusing on the applications of porous silicon in alkaline solution resulting from the corrosion and dissolution of porous silicon in these solutions [14][15][16] .…”

Section: Introductionmentioning

confidence: 99%

Investigation the effect of porosity on corrosion of macroporous silicon in 1.0M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Lai

Xiang

2015

Corrosion Science

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Section: Introductionmentioning

confidence: 99%

Investigation the effect of porosity on corrosion of macroporous silicon in 1.0M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Lai

Xiang

2015

Corrosion Science

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“…This thesis builds on the large number of studies by other scientists who have used porous silicon as an electrochemical gas sensor [6,7,8], which works on very simple principles.…”

Section: Electrochemical Sensorsmentioning

confidence: 99%

“…While all reported studies have used their own values for each of the parameters, one parameter remains remarkably constant in every sensor fabrication experiment in literature: the decision to always etch pores out of p-type silicon [6,7,8].…”

Section: Previous Workmentioning

confidence: 99%

“…Since in p-doped silicon the front-side is in forward bias, the back-side is in reverse and to overcome it an ohmic contact must be made onto this interface. This back-side ohmic contact is critical and is usually achieved through a metal evaporation or physical sputtering process; adding an extra, potentially expensive, processing step before etching can even begin [6,7,8].…”

Section: Previous Workmentioning

confidence: 99%

“…The literature reports wide variations in layer resistivity, ranging from 10 Ω to 10 MΩ, without any hindrance in sensitivity. While there are some layers that have a higher sensitivity factor, no layer that has survived the fabrication process has been unable to sense due to its resistivity value; a failure to sense is usually attributed to another factor (such as poor catalyst plating) [6,7,8].…”

Section: Scope Of Projectmentioning

confidence: 99%

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Fabrication and Characterization of a Palladium/Porous Silicon Layer

Lui¹

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Fabrication and Characterization of a Palladium/ Porous Silicon Layer Nicholas LuiA scientific paper can be considered a journey into the logic and mind of the scientist who performed the experiment. This paper, a little unconventional, is written as a reflection of how the author organizes and thinks through his topic. In the telling of it this way, he hopes the journey is as compelling for the reader as it was for him.When porous silicon is plated with a catalytic metal, the two materials can act together as a single entity whose electrical properties are sensitive to its environment -the sensing component of an electrochemical gas sensor. Etching pores into silicon is an electrochemical process; and which type of doped silicon used is one of its key parameters. For nearly all reported porous silicon gas sensors, the silicon has been of the p-doped variety -because pdoped porous etching is better understood and the layers that result from it are more predictable -despite n-doped silicon having potentially significant benefits in ease of fabrication and being more conducive to plating by a catalyst. This experiment is an attempt at creating a palladium plated n-doped porous silicon layer, and an examination into what differentiates this fabrication process and the layers that result from the traditional p-doped type.The porous layers to be plated are to be the same and would ideally have properties that are a close approximation to what a functional gas sensor would require. This experiment defined a process that fabricated this "ideal" layer out of N-type, <100>, double polished silicon wafers with a resistance of 20 Ω cm. The wafers were subjected to the anodic etching method with an HF/ethanol mixture as the electrolyte; and only two (of among many) fabrication parameters were varied: HF concentration of the electrolyte and total etching time. We find that a concentration of 12% HF (by volume) and an etching time of 6 hours result in layers most appropriate to carry into plating. The anodization current density is 15 mA cm -2. Deposition of the catalyst, palladium, is done using the electroless method by immersing the porous layer in a .001M PdCl 2 aqueous bath.Characterization of this Pd/Porous Silicon layer was done by measuring resistivity by four point probe and imaging through Scanning Electron Microscopy. It was found that layers of a v maximum average of 63 ± 6% porosity were created using our fabrication method. There is evidence of palladium deposition, but it is spotty and irregular and is of no improvement despite the n-doping wafer makeup. Resistivity in well-plated regions was measured to be 7-10 Ωcm, while resistivity in regions not well-plated was measured to be 70-140 Ω cm. This is comparable to previous literature values, indicating n-silicon porous silicon can be fabricated and still have potential as a catalytic layer, should metal deposition methods improve.Keywords: Porous Silicon, Electroless Plating, Anodic Etching. vi Chapter 1: IntroductionAt its most general, a porous mate...

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Electrical Characterization Techniques for Porous Silicon

Ciurea¹,

Lepadatu²

2016

Handbook of Porous Silicon

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Chemical surface modification of porous silicon with palladium and characterizations

Cited by 22 publications

References 23 publications

Investigation the effect of porosity on corrosion of macroporous silicon in 1.0M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Investigation the effect of porosity on corrosion of macroporous silicon in 1.0M sodium hydroxide solution using weight loss measurements, electrochemical methods and scanning electron microscope

Fabrication and Characterization of a Palladium/Porous Silicon Layer

Electrical Characterization Techniques for Porous Silicon

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