Chemical Structure–Physicochemical Property Relationships of Copolymers Utilizable for Negative-Tone Photoimaging via Chemical Amplification
Yun Hee Ko,
Hyeji Lee,
Hyunseok Kim
et al.
Abstract:We demonstrate an understanding of different physicochemical properties of copolymers induced by systematic changes in their structural parameters, i.e., the chemical structure of the comonomer unit, composition, molecular weight, and dispersity. The terpolymers were designed to be implemented in a chemically amplified resist (CAR) to form negative-tone patterns. With two basic repeating units of 4-hydroxystyrene and 2-ethyl-2methacryloxyadamantane as monomers for conventional CARs, the pendant group of the th… Show more
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