Chemical processing for inorganic fluoride and oxyfluoride materials having optical functions

Liquid-phase Synthesis of CaF₂ Particles and Their Low Refractive Index Characterization

“…7) Further, there is no mention included on the feasibility for the control of particle morphology, as well as their material performances. Fujiwara et al 8) and Grob et al 1) reported a development in the synthesis of fluoride material. Optical properties were also reported.…”

Synthesis and characterization of crystalline nanosized MgF2 powder via microemulsion route

“…[1][2][3][4]. Magnesium (II) fluoride (MgF 2 ) is one of the most interesting metal fluorides due to its low chemical reactivity even at elevated temperatures, low refractive index (1.38), high corrosion resistance, high thermal stability, and significant hardness [5][6][7][8].…”

MOCVD Fabrication of Magnesium Fluoride Films: Effects of Deposition Parameters on Structure and Morphology

“…[1][2][3] In this scenario, higher density semiconductor devices require scaling-down of dimensions that can be only obtained by reducing the wavelength in the photolithographic process used to define device line widths. [4] Optical components and the related antireflective coatings [5] are thus being forced toward shorter wavelengths to operate in the deep ultraviolet (DUV) region.…”

“…The number of available materials in the UV range is limited because of the strong absorption of several materials. Commonly used coatings in this region include metal oxides (Al 2 O 3 , Sc 2 O 3 , HfO 2 , and SiO 2 ) [8][9][10] and wide band-gap fluorides (MgF 2 , YF 3 , LaF 3 , AlF 3 , LiF, and CeF 3 ). [2,[11][12][13] Among these magnesium difluoride (MgF 2 ) represents a satisfactory competitor as a UV transparent material.…”