Abstract:The authors have studied the lateral oxidation of AlxGa1-xAs layers buried in vertical-cavity surface-emitting lasers using cross-sectional scanning transmission electron microscopy coupled with electron energy loss spectroscopy. Chemical maps and composition profiles of the oxidized AlOx layers have been produced. The sensitivity is such that trace compositions of a few % As and Ga can be detected in the AlOx with a spatial resolution of few nanometers on the recorded chemical maps. To demonstrate the perform… Show more
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