“…28,30,31 Some methods to calibrate the amplitude of the higher mode of the qPlus sensor with a long probe were proposed, such as scanning electron microscopy 28,30 and laser Doppler vibrometry. 31,32 Furthermore, the analysis of piezoelectric sensitivity, which is the ratio of the output voltage signals to the tip oscillation amplitude, is crucial because it determines the deection noise density, which dominates the minimum detectable force gradient in AFM. 33 Although several research groups have analyzed the piezoelectric current, 30 to the best of our knowledge, there have been no studies analyzing piezoelectric sensitivity.…”