Abstract:A study on Ar ϩ laser-assisted chemical beam epitaxy of InP with trimethylindium and tertiarybutylphophine is reported here. In situ monitoring of the laser-assisted growth surface is carried out using reflection high-energy electron diffraction. The growth rates over laser-irradiated and nonirradiated areas are interpreted in terms of physical chemistry of the physisorbed and chemisorbed layers. Two postulations on the photolytic mechanism responsible for growth enhancement with laser are made, which describe… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.