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DOI: 10.1002/(sici)1096-9918(200001)29:1<3::aid-sia697>3.0.co;2-#
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Chemical and structural characterization of thin films using electrons and photons

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“…However, physical and structural properties influence the intensity, binding energy and line shape of photoelectron peaks. [12] Therefore, we can obtain complementary information on morphological change over thickness from the change of full width at half-maximum (FWHM) of the XPS peaks, their line shape and intensity, or binding energy shift. Figure 4 shows core level spectra of F 1s, Ir 4f, N 1s and O 1s peaks for Firpic films with thickness.…”
Section: Relative Atomic Sensitivity Factors Electron Attenuation Lementioning
confidence: 99%
“…However, physical and structural properties influence the intensity, binding energy and line shape of photoelectron peaks. [12] Therefore, we can obtain complementary information on morphological change over thickness from the change of full width at half-maximum (FWHM) of the XPS peaks, their line shape and intensity, or binding energy shift. Figure 4 shows core level spectra of F 1s, Ir 4f, N 1s and O 1s peaks for Firpic films with thickness.…”
Section: Relative Atomic Sensitivity Factors Electron Attenuation Lementioning
confidence: 99%