Chemical analysis in photostructurable glass chips

Becker, Holger; Arundell, Martin; Harnisch, Alf; Hülsenberg, Dagmar

doi:10.1016/s0925-4005(02)00162-4

Cited by 30 publications

(11 citation statements)

References 6 publications

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“…Channels having a minimum depth of 25 m are also possible [74]. Recently, Becker et al reported the fabrication of a microchip electrophoresis device in a new type of photostructurable glass [76]. A separation of fluorescently labeled amino acids was demonstrated in channels which were 500 m deep and 200 m wide.…”

Section: B Microchannels In Glass and Quartzmentioning

confidence: 99%

Microfluidics meets MEMS

2003

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The use of planar fluidic devices for performing small-volume chemistry was first proposed by analytical chemists, who coined the term "miniaturized total chemical analysis systems" (TAS) for this concept. More recently, the TAS field has begun to encompass other areas of chemistry and biology. To reflect this expanded scope, the broader terms "microfluidics" and "lab-on-a-chip" are now often used in addition to TAS. Most microfluidics researchers rely on micromachining technologies at least to some extent to produce microflow systems based on interconnected micrometer-dimensioned channels. As members of the microelectromechanical systems (MEMS) community know, however, one can do more with these techniques. It is possible to impart higher levels of functionality by making features in different materials and at different levels within a microfluidic device. Increasingly, researchers have considered how to integrate electrical or electrochemical function into chips for purposes as diverse as heating, temperature sensing, electrochemical detection, and pumping. MEMS processes applied to new materials have also resulted in new approaches for fabrication of microchannels. This review paper explores these and other developments that have emerged from the increasing interaction between the MEMS and microfluidics worlds.

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Section: B Microchannels In Glass and Quartzmentioning

confidence: 99%

Microfluidics meets MEMS

2003

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“…The glass property in region of laser irradiation is modified and the laser irradiated part is preferentially etched away during etching process. Some earlier studies on microchannel fabrication with this method are, for instance, UV light irradiation of photostructurable glass followed by post wet chemical etching, [15][16][17] fs-NIR direct writing of photostructurable glass followed by post wet chemical etching [18][19][20][21] fs-NIR laser irradiation of silica followed by post wet chemical etching, 22 and instant etching during laser irradiation, i.e., laserinduced backside wet etching (LIBWE). [23][24][25] Instead of using wet chemical etching, an effective method has been developed to fabricate 3D homogeneous microchannels by water-assisted fs direct writing inside porous glass followed by postannealing for consolidation recently.…”

Section: Introductionmentioning

confidence: 99%

Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation

Wang

2012

Biomicrofluidics

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The study investigates the use of CO 2 laser to induce glass strip peeling off to form microchannels on soda lime gass substrate. The strip peeling exhibits a strong dependence on the energy deposition rate on the glass surface. In spite of the vast difference in the combination of laser power and scanning speed, when the ratio of the two makes the energy deposition rate in the range 3.0-6.0 J/(cm 2 s), the temperature rising inside glass will be above the strain point and reach the softening region of the glass. As a result, glass strip peeling is able to occur and form microchannels with dimensions of 20-40 lm in depth and 200-280 lm in width on the glass surface. Beyond this range, higher energy depsotion rate would lead to surface melting associated with solidification cracks and lower energy deposition rate causes the generation of fragment cracks.

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“…Photostructurable glasses such as Foturan are interesting materials for m-TAS or lab-on-chip, as they are inherently photosensitive, and hence do not require a photoresist layer for patterning (Dietrich et al, 1996;Becker et al, 2002). Attempts has been made to study laser machining of Foturan glass (Brokmann et al, 2002;Livingston & Helvajian, 2005;Stillman et al, 2008); however, the researches were carried out using ns ultraviolet (UV) laser instead of ultrashort infrared (IR) laser.…”

Section: Introductionmentioning

confidence: 99%

“…Photosensitive glasses also possess added advantage over fused silica in that heat treatment may be carried out to smoothen surfaces of microstructures through transformation to a glass ceramic (Cheng et al, 2003). The ability to directly form 3D microstructures in Foturan glass using lasers, together with its resistance to high temperature and corrosion, as well as high optical transparency, have made Foturan glass particularly attractive as a platform for the bioanalysis microdevices (Becker et al, 2002;Sugioka et al, 2005;Fisette & Meunier, 2006;Wang et al, 2008).…”

Section: Introductionmentioning

confidence: 99%

Ultrashort laser subsurface micromachining of three–dimensional microfluidic structures inside photosensitive glass

Wang

Zhou

2009

Laser Part. Beams

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A laser direct writing technique was used successfully to carry out subsurface micromachining of three-dimensional microfluidic structures. It involves simple steps of femtosecond laser irradiation to project a latent image of channels or chambers of various dimensions into a photosensitive Foturan glass, thermal annealing to produce crystallites of lithium metasilicates in the laser-irradiated regions, and use of a diluted hydrofluoric acid solution to remove the crystallized structures through selective chemical etching. The etched surfaces may be smoothened significantly through a secondary thermal annealing process. A microfluidic reagent mixer and reactor consisting of four cubic chambers and multiple channels was produced inside a single piece of glass to demonstrate that the technique can be used for rapid device fabrication without recourse to the cumbersome and expensive processes of alignment, stacking, bonding or assembly of the individual microcomponents. The direct writing technique makes it easy to integrate micro-optical and microfluidic components into a single chip.

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Chemical analysis in photostructurable glass chips

Cited by 30 publications

References 6 publications

Microfluidics meets MEMS

Microfluidics meets MEMS

Investigation on CO2 laser irradiation inducing glass strip peeling for microchannel formation

Ultrashort laser subsurface micromachining of three–dimensional microfluidic structures inside photosensitive glass

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